Vol.22 No.2 黄天斌等：大面积金刚石膜沉积过程的热应力分析 .155. 刚石膜表征，其金刚石特征峰的位置相对于标准 图8表示一个样品中心的Raman峰的位置， 峰有一个偏移.根据此偏移可以计算出金刚石膜图9表示一个样品边缘的Rama肌峰的位置.样 中的应力.这是通用的金刚石膜内应力的测试方 品中心的Raman峰的偏移大一些，说明应力也 法. 大一些，这和计算的结果是一致的 6 3 110120130140150160170 图6金刚石膜断口的电镜照片 /nm Fig.6 SEM of diamond fracture 图7无村底金刚石膜的Ramn谱 Fig.7 Raman spectrim of free standing diamond films 5.5 5.0 5.0 4.5 4.5 4.0 3.5 4.0 3.0 35 2.5 3.0 2.0 131132133134 135136 130131132133134135136 /nm /nm 图8样品的中心的Ramn峰的位置 图9样品的边缘的Raman峰的位置 Fig.8 Raman peak in the centre of sample Fig.9 Raman peak in the edge of sample 4结论 参考文献 I Spear K E.Diamond-ceramic Coating ofthe Future.J Am 在金刚石膜的生长过程中，有许多不稳定 Ceram Soc.1989,72(2):171 的环境因素，引起金刚石膜的热应力，金刚石膜 2 Ivan A Martorell.Gas Recyeling and Flow Control for Cost 的热应力是影响金刚石膜炸膜的主要因素，金 Reduction of Diamond Films Deposited by DC arc-jet. 刚石膜中的热应力沿径向分布是不均匀的，中 Diamond and Related Materials.1999.8(8):29 间比边上的大，主要是压应力，其值很大，容易 3 Marcus Asmann.A Review of Diamond CVD Utilizing 引起金刚石膜的炸裂.金刚石膜与钼界面的应 Halogenated Precursors.Diamond and related materials, 1999,811 力，容易引起金刚石膜底面和钼表面形成裂纹， Thermal Stress Analysis of Large Area Diamond Films HUANG Tianbin,LIU Jingming.TANG Weizhong,TONG Yumei,YU wenxiu,LU Fanxiu Materials Science and Engineering School.UST Beijing.Beijing 100083.China ABSTRACT The distribution of the thermal stress of large area diamond films is given by applying the ac- tual boundary condition.and it is checked by experiments.The result is that the thermal stress of large area diamond films is not uniform.the thermal stress in the middle of large area diamond films is lager than that in the edge of large area diamond films,the press stress is the mainly part of the thermal stress.The crack of diamond films is mainly duo to the large press stress. KEY WORDS large area diamond films;the thermal stress;numerical calculation