University of Electronic Science and Technology of China 1.光波导材料介绍 1956 表6-1.常用光波导材料性能对比 Propagation Pigtail Refractive Index Contrast T/O Coef. Maximum Loss L055 Index Range in Waveguide Birefringence dn/dT Modulation Passive (dB/cm) (dB/chip) (n) (An) (nTE-nTM) (K) Frequency /Active Silica [SiO2] 0.1 0.5 1.5 0-1.5% 104.102 105 1 kHz (T/O) Y/Y (Channel) Silicon [si] 0.1 1.0 3.5 70%[range=0] 1kHz (Silicon on Insulator Rib 104-102 1.8×104 (T/O) Y/N Silicon Oxynitride 0.1 1.0 Si02:1.5 0-30%[30%:SigN4 core] [SiO,Ny】 Si2N42.0 (Channel,SiO2 clad) 103.5x10 105 1kHz (T/O) Y/N Sol-Gels 0.1 0.5 1.2-1.5 0-1.5% 104.102 (Channel) 105 1 kHz Y/Y (T/O) Polymers 0.1 0.5 1.3-1.7 0-35% (Channel) 10-8.102 -1→4×104 >100 GHz(E/O) 1 kHz(T/O) Y/Y Lithium Niobate [LiNbO3] 0.5 2.0 2.2 0-0.5% 102.101 40 GHz Y/Y (Channel) 105 (E/O) ndium Phosphide 0-3% 40 GHz Y/Y [InP] 3 10 3.1 (Channel) 103 0.8×10 (E/O) Gallium Arsenide [GaAs] 0.5 2.0 3.4 0-14%[14%:AIAs clad] 103 2.5x104 20 GHz (Rib) (E/O) Y/Y 9University of Electronic Science and Technology of China 9 1.光波导材料介绍 表6-1. 常用光波导材料性能对比