X射线微区成分分析发展历史 In 1948 a prototype wavelength dispersive spectrometer was developed. In 1949 the first microprobe was built by Raymond Castaing,the father of X-ray microanalysis. 1956 first commercial Electron Probe Microanalyzer(EPMA)was developed in France- static electron probe. 1956-scanning EPMA developed in England. Late 1960s development of solid (Si(Li))state EDS detectors. Late 1960s EDS detector attached to an SEM.X射线微区成分分析发展历史