殷忠,等:飞秒激光在光敏玻璃上制作微凹面 1601 Micro-concave-surface Fabricated on a Photosensitive Glass by Femtosecond Laser wU Yin-zhong.2, WANG Qing-yue JIA Wei, HU Ming-lie, CHAI Lu? Physi (2 Ultra fast Laser Laboratory, School of Precision Instruments and Optoeletronics Engineering; Key laboratory of Optoelectronic Information Technical Science, Ministry of Education, Tianjin University, Tianjin 300072, China) Abstract: Micro-concave-surfaces were fabricated on the surface of a photosensitive glass(FOTURAN) by focused irradiation of femtosecond laser with 775 nm-wavelength and 150 fs-pulse duration),heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid(HF) for 50 minutes at room temperature. The morphologies of the micro-concave-surfaces were analyzed by atomic force microscope(AFM) and scanning electron microscope (SEM). The analysis indicates that the micro- concave-surfaces have smooth wall, clear edge, and are several tens of microns in diameter. By varying the incident single pulse energy (from 970 to 3 250 nJ)and number of pulses from 10 to 3 000 shots) nfluences of these two laser parameters on the fabrication results were characterized. The diameters of micro-concave-surfaces were found to saturate with these two incident parameters, and the reason was given. And, applications of mcirostructures fabricated on FOTURan by femtosecond laser were pointed out Key words: Femtosecond laser; Micro-concave-surface; Micromachining, FOtuRan glass; Photosensitive wU Yin-zhong was born in 1980. He received Ph. D. degree from Tianjin University China, in 2008. Now he works with China Academy of Engineer Physics in Mianyan Sichuan province and his research focuses on laser material processing巫殷 忠，等 ：飞秒 激光 在光 敏玻 璃上制作微凹面 16O1 M icr0一c0ncave—surface Fabricated on a Ph0t0sensitive Glassby Fem tosecond Laser W U Yin—zhong～，W ANG Qing—yue ，JIA W ei。，HU Ming—lie，CHAILu。 (1ResearchCenterofLaserFusion，ChinaAcademyof EngineerPhysics，Mianyang，Sich 621900。Chin) (2UltrafastLaserLaboratory，SchoolofPrecisionInstrumentsandOptoeletronicsEngineering；KP L口borat0 fOptoelectronicInformation TechnicalScience，M inistryofEducation，TianjinUniversit ，Tin ji 300072，Chi口) tact：M icro—concave—surfaceswere fabricated on thesurfaceofa photosensitiveglass (FOTURAN ) bv sed irradiation of femtosecond laser (with 775 nm—wavelength and 150 fs-pulse duration)，heat ：mentand wetchemicaletching in 8 ultrasonicsolution ofhydrofluoricacid (H F)for50 m inutesat 1 temperature． The m orphologies of the micro—concave—surfaces were analyzed bv atOmic force oscope (AFM ) and scanning electron microscope (SEM )． The analysis indicates that the micro— ave—surfaceshavesmooth wall，clearedge，and are severaltensofmicronsin diameter． By varying the entsingle pulse energy (from 970 to 3 250 nJ) and num ber of pulses (from 10 to 3 000 shots)， eneesO{these two laser param eters on the fabrication results were characterized． The diameters of O-concave—surfaces were found to saturate with these two incidentparameters，and the reason was 1．A nd，applicationsofmcirostructures fabricated on FOTURAN by fem tosecond 1aser were Dointed words：Femtosecond laser；M icro—concave—surface；M icromachining；FOTURAN glass；Photosensitive wU Yin—zhong wasborn in 1980． HereceivedPh．D．degreefrom TianjinUniversity． China， in 2008． Now he works with China Academ y of Engineer Physics in M ianyan， Sichuanprovinceand hisresearch focuseson lasermaterialprocessing．