·448▣ 北京科技大学学报 2003年第5期 3 Holmes A S,Syms R RA,Li Ming,et al.Fabrication of nics Technol Lett,1997,9(9):1238 buried channel wavguides on silicon substrates using 5 Wagner C D,Riggs W M,Davis L E,et al.Handbook of spin-on glass [J].Appl Opt,1998,32(25):4916 X-ray Photoelectron Spectroscopy [M].1979.52 4 Martin H,Peter K,Edgar V.Low-Loss fiber-matched low 6 Syms RR A,Holmes A S.Deposition of thick silico-tita- Temperature PECVD waveguide with small-core dimen- nia sol-gel films on Si substrates [J].J Non Cryst Solids, sions for optical communication systems [J].IEEE Photo- 1994,170:223 Fabrication and Performance of Membrane in Arrayed Waveguide Grating NAN Zheng.XIA Yang,YU Guanghud 1)Microelectronics R&D Center,Chinese Academy of Science,Beijing 100029,China 2)Materials Science and Engineering School,University of Science and Technology,Beijing 100083,China ABSTRACT Waveguide membrane on Si basement was fabricated by So-Gel method with a special kind of or- ganic Si as raw material.After a serial of tests including thickness test,optical test and XPS test,it was concluded that this membrane was thick enough and has good quality.Since Sol-Gel method always causes chap and split,a method how to deal with it was discussed.Finally,how to fabricate an arrayed waveguide grating with the mem- brane was also introduced. KEY WORDS organic Si:Sol-Gel method;arrayed waveguide grating(AWG);waveguide;membrane (上接第427页) Textural Analysis during Annealing of a Plain Low Carbon Steel Q235 Processed by Different Thermal Mechanical Processing Schedules TIAN Zhaoxu,YANG Ping",FENG Huiping,SUN Zuqing? 1)Materials Science and Engineering School,University of Science and Technology Beijing,Beijing 100083,China 2)State Key Laboratory for Advanced Metals and Materials,University of Science and Technology Beijing,Beijing 100083,China ABSTRACT The growth behavior of ferrite grains under three different thermal mechanical processing schedules was investigated by SEM,EBSD (electron back scattering diffraction)and X-ray diffraction techniques.Results show that the relative contribution of recovery,recrystallization and grain growth was related with the status of sec- ond-phase particles and the orientations of ferrite grains.The ultra-fine ferrite grains produced by deformation-en- hanced transformation had less driving force to recrystallize since less stored energy was left after deformation. They grow apparently because of the late precipitation of second-phase particles.Although ferrite deformed below A,temperature gained the highest stored energy and strongest texture,only partial recrystallization occurred in such grains because of the effective pinning of second-phase particles.The intensity of <111>fiber texture decreases more apparently than that of<100>fiber texture.When deformed at a+y dual-phase region,the ferrite grains grew in the way of recovery.The recrystallization tendencies of grains with <111>and <100>orientations are different. KEY WORDS deformation;texture;recrystallization;grain growth. 4 4 8 - 北 京 科 技 大 学 学 报 2 0 3 年 第 5 期 H o lm e s A S , Sy m s R R A , L i M ing , e t a l , Fab r i e at i o n o f b u r i e d e h a n n e l w va gu i d e s o n s ili e o n s u b s t r a t e s u s i n g s Pi n 一 o n g l a s s 【J j . A p l O Pt , 1 9 9 8 , 32 ( 2 5 ) : 4 9 16 M art i n H , P e t e r K , E d g ar V L o w 一 L o s s if b e r 一 m at c h e d l o w eT m P e r a t o r e P E C V D w va e g u i d e w iht s m a ll 一 e o er di m e n - s i o n s fo r o Pt i e a l c o m m u n i e at i o n s y s et m s [J ] . I E E E Ph o t o - n i e s eT e h n o l L e t , 1 9 9 7 , 9( 9 ) : 1 23 8 W 台gn e r C D , Ri g g s W M , D va i s L E , e t a l . H an db o o k o f X 一 ayr Ph o t o e l e e tr o n S P e e otr s e o yP 【M I . 1 97 9 . 5 2 S y m s R R A , Ho lm e s A 5 . D e P o s i ti o n o f th i c k s i li e o 一 ti at - n i a 5 0 1 一 g e l if lm s o n 5 1 s u b s t r a t e s [J ] . J N o n C yr s t S o li d s , 1 9 9 4 . 1 7 0 : 2 2 3 F ab r i e a t i o n an d P e r fo mr an e e o f M e m b r an e i n A r a y e d 认a/ v e g u id e G r a t i n g 瓦咬N hZ e ng ,气天又项 aY gn 伙 了U G au n g h u 沪 1 ) M i e r o e l e e t r o n i e s R& D C e n et r, C h i n e s e A e ad e m y o f s e i e n e e , B e ij i n g 10 0 0 2 9 , C h in a 2 ) M at e r i a l s S e i e n e e an d E雌i n e e r i飞 s e h o o l , U n ive r s ity o f s e i e n e e an d eT c hn o 1 0 g y , B e ij i飞 10 0 0 8 3 , Ch i n a A B S T R A C T 从a/ v e gu i d e m e m b arn e on 5 1 b a s e m ent w a s afb ir e at e d b y 5 0 一 G e l m e ht o d w i ht a s P e e i a l ik dn o f o r - g an i e 5 1 a s r aw m at ier a l . A ft e r a s e ir a l o f t e s t s i n e ldu i n g ht i e kn e s s t e s t , o Pt i e a l t e s t an d X P S t e s t , it w as e o cn l u de d t h at t h i s m e m b r an e w a s ht i e k e n ou hg an d h a s g o o d q u a li yt . S i n e e 5 0 1 一 G e l m e t h o d a lw a y s e au s e s e h ap an d s Pli t , a m e t h o d h o w t o d e al w iht i t w a s di s e u s s e d . F i n a ll y, h o w t o afb ir e at e an 印比 a y e d w va e igu d e g r a ti n g iw ht het m e m - b r a n e w a s a l s o i n t r o d u e e d . K E Y W O RD S o gr an i e 5 1 ; 5 0 1 一 G e l m e ht o d ; ar ay e d w va e gu ide g r a tign ( AW G ) ; w va e gul d e ; m e m b anr e (上接 第 4 2 7 页 ) eT x utr a l A n a ly s i s d u r i n g A n n e a li n g o f a P l a i n L o w C a r b o n S t e e l Q2 3 5 P or c e s s e d b y D i fe r e n t T h e mr a l M e e h an i e a l P r o c e s s i n g S e h e d u l e s 刀月N hZ a ox ul), 别刃 G尸动 9 1气尸百 N G uH iP gn ,气S 〔jN uZ q i心 , l ) M aet ir a l s S e i e n e e an d E n g i n e e r i n g S e h o o l , U n i v e rs ity o f s e ien e e an d eT e hn o l o gy B e ij in g , B e ij i n g l 0 0 0 8 3 , C h i n a 2 ) st at e K 即 L ab o art o 甲 of r A vd an e e d M e 回 5 an d Mate r ial s , nU i v e r s ity o f s c ien c e an d eT c h n o l o罗 B e ij in g , B e ij ign 10 o 0 8 3 , Ch in a A B S T R A C T hT e g r o wt h b e h va i o r o f fe 币t e gr ian s u n d e r htr e e d ifl 七r e n t hte rm a l m e e h ian e a l P ro e e s s ing s e h e du l e s w a s ivn e s t i g at e d by S E M , E B S D ( e l e e tr on b ac k s c at e ir gn d i价 a e t i o n ) an d X . r ay d i份 ac t ion et e hn iqu e s . R e s u l t s s h o w ht at het r e l at i v e e o n tir but i o n o f er e o v e yr, r e e yr s t a lli z at i o n an d gr ia n gr o wt h w a s er lat e d iw ht ht e s t a t u s o f s e e - o n d 一 Ph a s e Part i e l e s an d th e o ir e nt at i o n s o f fe放 e g r a l n s . hT e u latr 一 if n e fe ir t e g iar n s P r o dcu e d b y de of mr at i o n 一 e n - h a n e e d tr an s of mr at i o n h ad l e s s 面 v i n g of cr e t o er e w s tal li z e s i n e e l e s s s to er d en e r g y w a s l e ft a ft e r d e of mr at i o n · hT e y gr o w aP Par ent ly b e e au s e o f ht e lat e rP e e i Piat i o n o f s e e o dn 一 Ph a s e P art i e l e s . A lht o u g h fe 币 te d e of n n e d b e l o w A , t e m P e r a t u r e g ia n e d het h ihg e s t s t o r e d e ne gr y an d s otr n g e s t t e x ut r e , o n ly Part i a l er e yr s ta lli z at i o n o c e u r e d i n s uc h g r a i n s b e e au s e o f t h e e fe e t i v e Pin l n g o f s e e o n d 一 Ph as e P叭i e l e s . hT e iin e n s i yt o f < 川 > if b e r t e x trU e d e c er a s e s m o r e ap P aer nt ly th an t h at o f < 1 0 0 > if b e r t e x ut r e . w 】l e n d e fo mr e d at a 柳 du al 一 Ph a s e er g ion , t h e fe 币 te gr ia n s gr e w i n t h e w ay o f r e e o v e .yr T h e er e yr s t al li z at i o n t e n d e n e i e s o f g r a i n s w iht < 1 11> an d < 10 0 > o ir en at i o n s aer d ife r e n t . K E Y WO R D S d e fo mr at i o n : t e X ut r e ; r e e yr s ta lli z iat o n : gr ia n g or wt h