Summary Table of Surface Analytical Techniques Jump to a graph(58Kb)of Detection Limits vs.Probe Size for analytical techniques. (You will need a browser that supports tables to properly view the following.) Analytical Technique Typical Applications Signal Detected Elements Organic Detection Depth Imaging/ Lateral Resolution Detected Information Limits Resolution Mapping (Probe Size) Auger Surface analysis and high resolution Auger electrons from Li-U 0.1-1a% depth profiling near-surface atoms <2 nm Yes 100 nm FE Auger Surface analysis,microanalysis, Auger electrons from Li-U 0.01-1a% 2-6nm Yes microarea depth profiling near-surface atoms AFM/STM Surface imaging with near atomic Atomic scale roughness 0.01nm Yes resolution Go to top,page down. Analytical Elements Organic Detection Depth Imaging/ Lateral Resolution Typical Applications Signal Detected Technique Detected Information Limits Resolution Mapping (Probe Size) micro-FTIR dentification of polymers,plastics, Infrared organic films,fibers,and liquids absorption H-U Molecular groups 0.1-100ppm No 5 microns 8e9-le12 TXRF Metallic contamination on semiconductor Fluorescent X- S-U 5nm Yes rays at/cm2 10mm wafers XPS/ESCA Surface analysis of organic and inorganic Photoelectrons Li-U Chemical 0.01-1at% 1-10nm Yes molecules bonding 75 microns-2 mm Go to top,page up,page down. Analvtical Elements Organic Detection Lateral Resolution Technique Typical Applications Signal Detected Depth Imaging/ Detected Information Limits Resolution Mapping (Probe Size) HFS Hydrogen in thin films Forward scattered (Quantitative) H,D hydrogen atoms 0.01at% 50nm 2 mm x 10 mm 1-10at% (7220) RBS Quantitative thin film Backscattered He atoms Li-U 0.01-1at% 2-20nm Yes 2 mm composition and thickness 20<Z<701 0.01-0.001at% Z>70) Go to top,page up,page down. Summary Table of Surface Analytical Techniques© Jump to a graph (58Kb) of Detection Limits vs. Probe Size for analytical techniques. (You will need a browser that supports tables to properly view the following.) Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) Auger Surface analysis and high resolution depth profiling Auger electrons from near-surface atoms Li - U -- 0.1 - 1 at% <2 nm Yes 100 nm FE Auger Surface analysis, microanalysis, microarea depth profiling Auger electrons from near-surface atoms Li - U -- 0.01 - 1 at% 2 - 6 nm Yes <15 nm AFM/STM Surface imaging with near atomic resolution Atomic scale roughness -- -- -- 0.01 nm Yes 5 nm Go to top, page down. Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) micro-FTIR Identification of polymers, plastics, organic films, fibers, and liquids Infrared absorption H - U Molecular groups 0.1 - 100 ppm -- No 5 microns TXRF Metallic contamination on semiconductor wafers Fluorescent X￾rays S - U -- 8e9-1e12 at/cm 2 5 nm Yes 10 mm XPS/ESCA Surface analysis of organic and inorganic molecules Photoelectrons Li - U Chemical bonding 0.01 - 1 at% 1 - 10 nm Yes 75 microns - 2 mm Go to top, page up, page down. Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) HFS Hydrogen in thin films (Quantitative) Forward scattered hydrogen atoms H, D -- 0.01 at% 50 nm No 2 mm x 10 mm RBS Quantitative thin film composition and thickness Backscattered He atoms Li - U -- 1 - 10 at% (Z<20) 0.01-1 at% (20<Z<70) 0.01-0.001 at% (Z>70) 2 - 20 nm Yes 2 mm Go to top, page up, page down