CMOS Fabrication CMOS transistors are fabricated on silicon wafer photolithography process similar to printing press On each step,different materials are deposited or etched Easiest to understand by viewing both top and cross-section of wafer in a simplified process Note:photolithography from Greek photo(light),lithos(stone),and graphe(picture) means "carving pictures in stone using light Digital IC 4Digital IC CMOS Fabrication • CMOS transistors are fabricated on silicon wafer • photolithography process similar to printing press • On each step, different materials are deposited or etched • Easiest to understand by viewing both top and cross-section of wafer in a simplified process • Note:photolithography from Greek photo(light),lithos(stone),and graphe(picture) means “carving pictures in stone using light” 4