上游充通大学 FIB加工针尖 SHANGHAI JIAO TONG UNIVERSITY Non-coated Si,N.cantilever 1)Sputtering of electrode layer (Au,Pt,Ir,etc.) 2)Deposition of insulation layer Parylene C(force constant after modification:~0.5 N/m) SiN(force constant after modification:~1-2 N/m) 3)FIB-milling lon-column E-column 52° Stage Cross section faceFIB加工针尖