12 10 8 6 ㄖ 4 s8 D 2 0 D 10 20 30 40 50 60 70 80 Porosity (% FIG.6.Average pore size vs total porosity for several sol-gel based mate- rials(data points include porous SiO2,HSQ,and MSQ based dielectrics,the average pore size was determined by several techniques (see Ref.24). PDF文件使用"pdfFactory”试用版本创建w,fineprint..cnPDF 文件使用 "pdfFactory" 试用版本创建 Ìwww.fineprint.cn Ì