Contents 10. Quantum-Effect Devices.. ,331 101. Tunnel Diode 331 10.1.1. Tunnel effect 10.1.2. Tunnel diode 333 10.2. Low-dimensional devices ,336 10.2. 1. Energy band .337 10.2. 2. Density of states. 343 10.2.3. Conductance of a ID semiconductor sample 10.2 4. 2D and ID Mos transistors 350 103. Single-electron transistor……… 353 10.3. 1. Tunnel junction. 10.3.2. Double tunnel junction 355 103.3. Single-electron transistor. Problems… 361 11. Semiconductor Processing 363 11. Semiconductor materials 363 11. 2. Silicon crystal growth and refining 11.3. 1. Ion implantation.... 367 11.3.2. Doping impurity diffusion.. 370 1133. Gas-phase diffusion…………… 11. 4. Oxidation .374 11.5. Chemical vapor deposition(CVD)…… 381 11.5. 1. Silicon deposition and epitaxy 381 115.2. Dielectric layer deposition……… 382 11.6. Photolithography 11.8. Metallization 391 1 1.8.2. Metal deposition ,391 11. 83. Metal silicide 11.9. CMOS process 11.10. NPn bipolar process.……… Problems∴ 405 12. Anne ,409 Al. Physical Quantities and Units 409 A2. Physical Constants ,410 A3. Concepts of Quantum Mechanics A4. Crystallography -Reciprocal Space. 414 A5. Getting Started with Matlab 418 A6. Greek alphabet 卡卡“·““ A7. Basic Differential Eq 427Contents ix 10. 10.1. 10.1.1. 10.1.2. 10.2. 10.2.1. 10.2.2. 10.2.3. 10.2.4. 10.3. 10.3.1. 10.3.2. 10.3.3. 11. 11.1. 11.2. 11.3. 11.3.1. 11.3.2. 11.3.3. 11.4. 11.5. 11.5.1. 11.5.2. 11.6. 11.7. 11.8. 11.8.2. 11.8.3. 11.9. 11.10. 12. Al. A2. A3. A4. A5. A6. A7. Quantum-Effect Devices Tunnel Diode Tunnel effect Tunnel diode Low-dimensional devices Energy bands Density of states Conductance of a 1D semiconductor sample 2D and 1D MOS transistors Single-electron transistor Tunnel junction Double tunnel junction Single-electron transistor Problems Semiconductor Processing Semiconductor materials Silicon crystal growth and refining Doping techniques Ion implantation Doping impurity diffusion Gas-phase diffusion Oxidation Chemical vapor deposition (CVD) Silicon deposition and epitaxy Dielectric layer deposition Photolithography Etching Metallization Metal deposition Metal silicides CMOS process NPN bipolar process Problems Annex Physical Quantities and Units Physical Constants Concepts of Quantum Mechanics Crystallography – Reciprocal Space Getting Started with Matlab Greek alphabet Basic Differential Equations Index 331 331 331 333 336 337 343 348 350 353 353 355 358 361 363 363 364 367 367 370 373 374 381 381 382 384 388 391 391 392 393 399 405 409 409 410 411 414 418 426 427 431