4.39 550 RF Silver Ag 962 10.5 847 958 1105Ex w Mo Ta,Mo DC.RF Silver Bromide AgBr 432 6.47 -380 Ta RF n=2.253 Silver Chloride AgCI 455 5.56 -520 Mo,Pt o TRF n=2.07 Silver lodide Agl 558 6.01 500 Ta RF n=2.21 Na 98 0.97 74 124192 Ta,SS e器u Sodium Bromide NaBr 747 3.20 400 RF Preheat gently to outgas.n1.641 Sodium Chloride NaCl 801 2.17 530 6 Ta,W.Mo 0 Sodium Cyanide NaCN 564 550 Ag RF Preheat gently to outgas.n1.452 Sodium Fluoride NaF 993 2.56 -1000G Mo,Ta,W Preheat gently to outgas.No decomposition.n= 1.336 Sodium Hydroxide NaOH 318 2.13 470 Pt Preheat gently to outgas.n1.358 Spinel MgO35Al2O3 8.0 G RF 0=172 769 2.6 239 309 403p w.Ta.Mo w RF.DC Wets but does not alloy with refractory metals. May react in air. 875 3.05 n=1.650 SF2 1473 4.24 -1000 RF 01442 Strontum Oxde Sro 2430 4.7 1500 Mo N203 RF Reacts with molybdenum and tungsten.n=1.810 Strontium Sulfide srs 22000 3.70 Mo RF Decomposes.n=2.107 Sulftur Sa 113 2.07 13 19 57 w Bad for vacuum systems.n=1.957 NI/Fe/Mo 1410 8.9 RF.DC Tantalum Ta 2996 16.6196022402590Ex DC.RF Forms good films. Tantalum Boride TaB2 3000(2) 11.15 RF.DC Tantalum Carbide Tac 3880 13.9 2500 RF,DC Tantalum Nitride TaN 3360 16.30 RF.RF-R, Evaporates tantalum in 103 Torr nitrogen. Tantalum Pentoxide 1872 1550 1780 1920G Ta w RF,RF-R Tantalum Sulfide Tas2 >1300 RF Technetium Tc 2200 11.5 1570180020g0 PTFE 330 2.9 Baffied source.Fim structure doubtful. Te 452 6.25 157 207 277 w.Ta w.Ta Al203.Q RF Toxic.Wets without alloying.n1.002 Tb 1356 823 800 950 1150Ex Ta Al2O3 RF Terbium Fluoride TbFa 1172 -800 RF Terblum Oxide Tb2O3 2387 7.87 1300 RF Parially decomposes. Terbium Peroxide Tb4O7 Ta RF Films TbO. Thallium 304 1185 280 360 470 P w.Ta Al2O3,Q Very toxic.Wets freely. Silicon Telluride SiTe2 - 4.39 - - 550 - - - - Q RF - Silver Ag 962 10.5 847 958 1105 Ex W Mo Ta, Mo Al2O3 W DC, RF Silver Bromide AgBr 432 D 6.47 - - ~380 - Ta - - Q RF n = 2.253 Silver Chloride AgCl 455 5.56 - - ~520 - Mo, Pt - Mo Q RF n = 2.07 Silver Iodide AgI 558 6.01 - - ~500 - Ta - - - RF n = 2.21 Sodium Na 98 0.97 74 124 192 - Ta, SS - - Q - Preheat gently to outgas. Metal reacts quickly in air.n = 4.22 Sodium Bromide NaBr 747 3.20 - - ~400 - - - - Q RF Preheat gently to outgas. n = 1.641 Sodium Chloride NaCl 801 2.17 - - 530 G Ta, W, Mo - - Q RF Copper oven, little decomposition. Preheat gently to outgas. n = 1.544 Sodium Cyanide NaCN 564 - - - ~550 - Ag - - - RF Preheat gently to outgas. n = 1.452 Sodium Fluoride NaF 993 2.56 - - ~1000 G Mo, Ta, W - - BeO RF Preheat gently to outgas. No decomposition. n = 1.336 Sodium Hydroxide NaOH 318 2.13 - - ~470 - Pt - - - - Preheat gently to outgas. n = 1.358 Spinel MgO35Al2O3 - 8.0 - - - G - - - - RF n = 1.72 Strontium Sr 769 2.6 239 309 403 P W, Ta, Mo W W VC RF, DC Wets but does not alloy with refractory metals. May react in air. Strontium Chloride SrCl2 875 3.05 - - - - - - - - - n = 1.650 Strontium Fluoride SrF2 1473 4.24 - - ~1000 - - - - Al2O3 RF n = 1.442 Strontium Oxide SrO 2430 S 4.7 - - 1500 - Mo - - Al2O3 RF Reacts with molybdenum and tungsten. n = 1.810 Strontium Sulfide SrS >2000 3.70 - - - - Mo - - - RF Decomposes. n = 2.107 Sulfur S8 113 2.07 13 19 57 P W - W Q - Bad for vacuum systems. n = 1.957 Supermalloy Ni/Fe/Mo 1410 8.9 - - - G - - - - RF, DC Sputtering preferred; or co-evaporate from two sources, permalloy and molybdenum. Tantalum Ta 2996 16.6 1960 2240 2590 Ex - - - - DC, RF Forms good films. Tantalum Boride TaB2 3000(?) 11.15 - - - - - - - - RF, DC - Tantalum Carbide TaC 3880 13.9 - - ~2500 - - - - - RF, DC - Tantalum Nitride TaN 3360 16.30 - - - - - - - - RF, RF-R, DC Evaporates tantalum in 10-3 Torr nitrogen. Tantalum Pentoxide Ta2O5 1872 8.2 1550 1780 1920 G Ta W W VC RF, RF-R Slight decomposition.Evaporates in 10-3 Torr oxygen. n = 2.6 Tantalum Sulfide TaS2 >1300 - - - - - - - - - RF - Technetium Tc 2200 11.5 1570 1800 2090 - - - - - - - Teflon PTFE 330 2.9 - - - - W - - - RF Baffled source. Film structure doubtful. Tellurium Te 452 6.25 157 207 277 P W, Ta W W, Ta Al2O3 , Q RF Toxic. Wets without alloying. n =1.002 Terbium Tb 1356 8.23 800 950 1150 Ex Ta - - Al2O3 RF - Terbium Fluoride TbF3 1172 - - - ~800 - - - - - RF - Terbium Oxide Tb2O3 2387 7.87 - - 1300 - Ir - - - RF Partially decomposes. Terbium Peroxide Tb4O7 - D - - - - - Ta - - - RF Films TbO. Thallium Tl 304 11.85 280 360 470 P W, Ta - W Al2O3 , Q DC Very toxic. Wets freely