Passive/Active Actuators Mount 14 urad FSM MOUNT PHYSIK INS Angular range+/-7° ° Angular res.+/-0.0008°(14urad) 600 urad FSM O Linear Range 1 cm Linear res I um FSM+ODL Angular Range +/-600 urad Angular Res. +/-0.05 urad Linear Range 12 um · Linear res.0.2nm 4‖。十 Pyramid Errors W/o fsm correction SR=0.444 Pyramid Errors 7 /fSM Correction Pyramidal mirror Pyramidal mount SR=0.960Chart: 7 Passive/Active Actuators Passive/Active Actuators 1 2 3 4 5 6 FSM+ODL • Angular Range +/- 600 µrad • Angular Res. +/- 0.05 µrad • Linear Range 12 µ m • Linear Res. 0.2 nm FSM+ODL • Angular Range +/- 600 µrad • Angular Res. +/- 0.05 µrad • Linear Range 12 µ m • Linear Res. 0.2 nm FSM MOUNT •Angular Range +/- 7 ° • Angular Res. +/- 0.0008° (14 µrad) • Linear Range 1 cm • Linear Res. 1 µ m FSM MOUNT •Angular Range +/- 7 ° • Angular Res. +/- 0.0008° (14 µrad) • Linear Range 1 cm • Linear Res. 1 µ m 7° 600 µrad 0.05 µrad FSM Mount 14 µrad Pyramid Errors w/o FSM Correction SR = 0.444 Pyramid Errors w/ FSM Correction Pyramidal Mirror Pyramidal mount SR = 0.960