谢新良等：考虑磁滞的铁稼磁致伸缩位移传感器输出电压模型及结构设计 ·1237· 1/4,传感器的线性度显著提高. teristic model of magnetostrictive displacement sensor under a heli- 传感器的重复性指在相同的工作条件下，传感器 cal magnetic field and stress.IEEE Trans Appl Supercond,2016, 26(4):1 输入量按同一方向作全量程连续多次测试时所得输入 [7]Zhou X Z,Yu C,Xiong Y Q,et al.Application of Fes:Gan of 输出特性曲线不重合的程度.按同一方向做全量程重 line to magnetostrictive displacement sensors.J Chongqing Univ, 复实验10次，得传统结构重复性w1=0.038%,结构 2013,36(5):64 改进后的重复性w,=0.013%.故新结构的重复性误 (周新志，余超，熊胤琪，等.新型Feg3Ga,波导丝在磁致伸 差约降低为传统结构的1/3，传感器的重复性显著提高. 缩位移传感器中的应用.重庆大学学报，2013,36(5)：64) 传感器的迟滞是指传感器在正反行程期间输入和 [8] Wang B W,Zhang L Y,Wang P,et al.Analysis of detection sig- nal for magnetostrictive displacement sensor.Opt Precision Eng, 输出特性曲线不重合的程度，当输入信号相等时，传 2016,24(2):358 感器正反行程输出信号大小不相等.正反行程重复10 (王博文，张露予，王鹏，等.磁致伸缩位移传感器检测信号 次实验，得传统结构的迟滞专，=0.072%，新结构的迟 分析.光学精密工程，2016,24(2)：358) 滞专2=0.01%，结构改进后传感器的迟滞约降低为结 [9]Ferrari P,Flammini A,Marioli D,et al.Introducing a new meas- 构改进前的1/7，传感器的迟滞性显著减小. urement method for magnetostrictive linear displacement transduc- ers /IEEE Instrumentation Measurement Technology Conference 3结论 Proceedings.Victoria,2008:1766 [10]Yu X W,Zhao H,Liu WW,et al.Analysis and conditioning of (1)考虑铁磁材料的磁滞，建立了磁致伸缩位移 induced signal in magnetostrictive displacement sensor.J Dalian 传感器的输出电压模型，计算值与实验值之间变化趋 Jiaotong Univ,2013,34(3):56 势吻合，表明所建立的模型能够描述输出电压与偏置 (于希文，赵辉，刘伟文，等.磁致伸缩位移传感器感应信号 的分析周理.大连交通大学学报，2013,34(3)：56) 磁场、激励磁场、波导丝材料、检测线圈之间的关系. 11]Tao R J,Zhao H,Liu WW,et al.Designment of Bi-waveguide (2)设计了一种新的磁致伸缩位移传感器结构， differential magnetostrictive displacement sensor.Chin Sens Ac- 通过理论分析和实验验证了新结构能有效消除磁滞效 uators,2010,23(6):799 应产生的位移迟滞，并且使电压信号的信噪比由14.7 (陶若杰，赵辉，刘伟文，等.双丝差动型磁致伸缩位移传感 dB提高到27.6dB,提高了传感器的测量精度 器结构设计.传感技术学报，2010,23(6)：799) [12]Hristoforou E,Dimitropoulos PD.Petrou J.A new position sen- (3)制作了样机，对比了传感器结构改进前后的 sor based on the MDL technique.Sens Actuators A Phys,2006, 性能指标，证明了新结构能改善传感器的线性度、重复 132(1):112 性、迟滞性.本研究工作可为磁致伸缩位移传感器的 [13]Seco F,Martin J M,Pons J L,et al.Hysteresis compensation in 研究、优化、生产提供理论依据和实验基础 a magnetostrictive linear position sensor.Sens Actuators A Phys, 2004,110(1-3):247 参考文献 [14]William R C.Theory of magnetostrictive delay lines for pulse and continuous wave transmission.IRE Trans Utrason Eng,1959, [1]Zhang K W,Zhang L,Fu LL,et al.Magnetostrictive resonators PGUE-7:16 as sensors and actuators.Sens Actuators A Phys,2013,200:2 [15]Li J H,Gao XX.Zhu J,et al.Wiedemann effect of Fe-Ga [2]Calkins F T,Flatau A B,Dapino M J.Overview of magnetostrictive sensor technology.J Intell Mater Syst Struct,2007,18(10):1057 based magnetostrictive wires.Chin Phys B,2012,21 (8): [3]He J L,Li J X,Zhu J,et al.Stress corrosion behavior of Fegs 087501-1 Gas polyerystalline in simulated seawater.Funct Mater,2013, [16]Calkins FT,Smith RC,Flateau A B.An energy-based hystere- 44(14):2059 sis model for magnetostrictive transducers.IEEE Trans Magnet- (贺君良，李金许，朱洁，等.FessGais多品在模拟海水中的 ics,2000,36(2):429 应力腐蚀行为研究.功能材料，2013,44(14)：2059) [17]Xiong L,Zhou J Y,Song D J,et al.Modeling and experimental [4]Zeng J W,Zhang Q D,Miao C X,et al.Stress nondestructive analysis of current transformer based on modified J-A hysteretic testing of strip steel based on transmissive magnetoelastic effect. model.High Voltage Eng,2014,40(2):482 Chin J Eng.2015.37(Suppl 1):12 (熊兰，周健瑶，宋道军，等。基于改进J-A磁滞模型的电流互 (曾杰伟，张清东，缨存孝，等.透射式磁弹性带钢应力无损 感器建模及实验分析.高电压技术.2014.40(2)：482) 检测.工程科学学报，2015,37（增刊1）：12) [18]Weng L,Luo N,Zhang L Y,et al.Design and experiment of a [5]Zhang L Y,Wang B W.Weng L,et al.The output voltage model testing device for Fe-Ga magnetic properties.Trans China Elec- of magnetostrictive displacement sensor in helical magnetic field trotech Soc,2015,30(2):237 and its experimental study.Trans China Electrotech Soc,2015,30 (翁玲，罗柠，张露予，等.F©-Ga合金磁特性测试装置的设 (12):21 计与实验.电工技术学报，2015,30(2)：237) (张露予，王博文，翁玲，等.螺旋磁场作用下磁致伸缩位移 [19]Zhang L Y,Wang B W,Yin X W,et al.The output characteris- 传感器的输出电压模型及实验.电工技术学报，2015,30 tics of galfenol magnetostrictive displacement sensor under the (12):21) helical magnetic field and stress.IEEE Trans Magnetics,2016, [6]Zhang L Y,Wang B W,Sun Y,et al.Analysis of output charac- 52(7):4001104谢新良等: 考虑磁滞的铁稼磁致伸缩位移传感器输出电压模型及结构设计 1 / 4,传感器的线性度显著提高. 传感器的重复性指在相同的工作条件下,传感器 输入量按同一方向作全量程连续多次测试时所得输入 输出特性曲线不重合的程度. 按同一方向做全量程重 复实验 10 次,得传统结构重复性 棕1 = 0郾 038% ,结构 改进后的重复性 棕2 = 0郾 013% . 故新结构的重复性误 差约降低为传统结构的1/ 3,传感器的重复性显著提高. 传感器的迟滞是指传感器在正反行程期间输入和 输出特性曲线不重合的程度. 当输入信号相等时,传 感器正反行程输出信号大小不相等. 正反行程重复 10 次实验,得传统结构的迟滞 孜1 = 0郾 072% ,新结构的迟 滞 孜2 = 0郾 01% ,结构改进后传感器的迟滞约降低为结 构改进前的 1 / 7,传感器的迟滞性显著减小. 3 结论 (1)考虑铁磁材料的磁滞,建立了磁致伸缩位移 传感器的输出电压模型,计算值与实验值之间变化趋 势吻合,表明所建立的模型能够描述输出电压与偏置 磁场、激励磁场、波导丝材料、检测线圈之间的关系. (2)设计了一种新的磁致伸缩位移传感器结构, 通过理论分析和实验验证了新结构能有效消除磁滞效 应产生的位移迟滞,并且使电压信号的信噪比由 14郾 7 dB 提高到 27郾 6 dB,提高了传感器的测量精度. (3)制作了样机,对比了传感器结构改进前后的 性能指标,证明了新结构能改善传感器的线性度、重复 性、迟滞性. 本研究工作可为磁致伸缩位移传感器的 研究、优化、生产提供理论依据和实验基础. 参 考 文 献 [1] Zhang K W, Zhang L, Fu L L, et al. Magnetostrictive resonators as sensors and actuators. Sens Actuators A Phys, 2013, 200:2 [2] Calkins F T, Flatau A B, Dapino M J. Overview of magnetostrictive sensor technology. J Intell Mater Syst Struct, 2007, 18(10): 1057 [3] He J L, Li J X, Zhu J, et al. Stress corrosion behavior of Fe85 Ga15 polycrystalline in simulated seawater. J Funct Mater, 2013, 44(14): 2059 (贺君良, 李金许, 朱洁, 等. Fe85 Ga15 多晶在模拟海水中的 应力腐蚀行为研究. 功能材料, 2013, 44(14): 2059) [4] Zeng J W, Zhang Q D, Miao C X, et al. Stress nondestructive testing of strip steel based on transmissive magnetoelastic effect. Chin J Eng, 2015, 37(Suppl 1): 12 (曾杰伟, 张清东, 缪存孝, 等. 透射式磁弹性带钢应力无损 检测. 工程科学学报, 2015, 37(增刊 1): 12) [5] Zhang L Y, Wang B W, Weng L, et al. The output voltage model of magnetostrictive displacement sensor in helical magnetic field and its experimental study. Trans China Electrotech Soc, 2015, 30 (12): 21 (张露予, 王博文, 翁玲, 等. 螺旋磁场作用下磁致伸缩位移 传感器的输出电压模型及实验. 电工技术学报, 2015, 30 (12): 21) [6] Zhang L Y, Wang B W, Sun Y, et al. Analysis of output charac鄄 teristic model of magnetostrictive displacement sensor under a heli鄄 cal magnetic field and stress. IEEE Trans Appl Supercond, 2016, 26(4): 1 [7] Zhou X Z, Yu C, Xiong Y Q, et al. Application of Fe83 Ga17 of line to magnetostrictive displacement sensors. J Chongqing Univ, 2013, 36(5): 64 (周新志, 余超, 熊胤琪, 等. 新型 Fe83 Ga17 波导丝在磁致伸 缩位移传感器中的应用. 重庆大学学报, 2013, 36(5): 64) [8] Wang B W, Zhang L Y, Wang P, et al. Analysis of detection sig鄄 nal for magnetostrictive displacement sensor. Opt Precision Eng, 2016, 24(2): 358 (王博文, 张露予, 王鹏, 等. 磁致伸缩位移传感器检测信号 分析. 光学精密工程, 2016, 24(2): 358) [9] Ferrari P, Flammini A, Marioli D, et al. Introducing a new meas鄄 urement method for magnetostrictive linear displacement transduc鄄 ers / / IEEE Instrumentation & Measurement Technology Conference Proceedings. Victoria, 2008: 1766 [10] Yu X W, Zhao H, Liu W W, et al. Analysis and conditioning of induced signal in magnetostrictive displacement sensor. J Dalian Jiaotong Univ, 2013, 34(3): 56 (于希文, 赵辉, 刘伟文, 等. 磁致伸缩位移传感器感应信号 的分析调理. 大连交通大学学报, 2013, 34(3): 56) [11] Tao R J, Zhao H, Liu W W, et al. Designment of Bi鄄waveguide differential magnetostrictive displacement sensor. Chin J Sens Ac鄄 tuators, 2010, 23(6): 799 (陶若杰, 赵辉, 刘伟文, 等. 双丝差动型磁致伸缩位移传感 器结构设计. 传感技术学报, 2010, 23(6): 799) [12] Hristoforou E, Dimitropoulos P D, Petrou J. A new position sen鄄 sor based on the MDL technique. Sens Actuators A Phys, 2006, 132(1): 112 [13] Seco F, Mart侏n J M, Pons J L, et al. Hysteresis compensation in a magnetostrictive linear position sensor. Sens Actuators A Phys, 2004, 110(1鄄3): 247 [14] William R C. Theory of magnetostrictive delay lines for pulse and continuous wave transmission. IRE Trans Ultrason Eng, 1959, PGUE鄄7: 16 [15] Li J H, Gao X X, Zhu J, et al. Wiedemann effect of Fe鄄鄄 Ga based magnetostrictive wires. Chin Phys B, 2012, 21 ( 8 ): 087501鄄1 [16] Calkins F T, Smith R C, Flateau A B. An energy鄄based hystere鄄 sis model for magnetostrictive transducers. IEEE Trans Magnet鄄 ics, 2000, 36(2): 429 [17] Xiong L, Zhou J Y, Song D J, et al. Modeling and experimental analysis of current transformer based on modified J鄄鄄 A hysteretic model. High Voltage Eng, 2014, 40(2): 482 (熊兰, 周健瑶, 宋道军, 等. 基于改进 J鄄鄄A 磁滞模型的电流互 感器建模及实验分析. 高电压技术, 2014, 40(2): 482) [18] Weng L, Luo N, Zhang L Y, et al. Design and experiment of a testing device for Fe鄄鄄Ga magnetic properties. Trans China Elec鄄 trotech Soc, 2015, 30(2): 237 (翁玲, 罗柠, 张露予, 等. Fe鄄鄄Ga 合金磁特性测试装置的设 计与实验. 电工技术学报, 2015, 30(2): 237) [19] Zhang L Y, Wang B W, Yin X W, et al. The output characteris鄄 tics of galfenol magnetostrictive displacement sensor under the helical magnetic field and stress. IEEE Trans Magnetics, 2016, 52(7): 4001104 ·1237·