Examples of Resistor Structures in ICs Metal contact Film type resistor Metal contact SiO dielectric material SiO dielectric material 半导体制造技术 by Michael Quirk and Julian Serda Figure 3.1 电信学院微电子教研室半导体制造技术 电信学院微电子教研室 by Michael Quirk and Julian Serda Examples of Resistor Structures in ICs Metal contact Film type resistor SiO2, dielectric material Metal contact SiO2, dielectric material Figure 3.1