(OoI (112) (12 Germanium Silicon FIGURE 51.2 Section of the longitudinal piezoresistivity surface, the maximum sensitivity directions in Si and Ge are shown Keys, 1960] ESL 2900 Series △R o100K|/ H Strains 02 1000800600400200 0.4 日GFL=9.8 FIGURE 51.3 Relative changes of resistance for compressive and tensile strain applied parallel to the current direction. Note the increase of gage factor with sheet resistivity. e 2000 by CRC Press LLC© 2000 by CRC Press LLC FIGURE 51.2 Section of the longitudinal piezoresistivity surface, the maximum sensitivity directions in Si and Ge are shown [Keys, 1960]. FIGURE 51.3 Relative changes of resistance for compressive and tensile strain applied parallel to the current direction. Note the increase of gage factor with sheet resistivity. 1.0 0.8 0.6 0.4 0.2 0.2 1000 800 800 600 600 1000 400 400 200 200 0.4 0.6 0.8 1.0 1 K½/ 10 K½/ 100 K½/ GFL = 5.5 GFL = 9.8 GFL = 13.8 R R (%) Tension m Strains m Strains Compression ESL 2900 Series