b) How would you distinguish between i) the reaction-limited and ii)a transport- limited cases 5 p In the reaction-limited regime, the temperature dependence of the film growth ate exhibits arrhenius behavior △G △G In the transport-limited regime, the deposition rate is given by 32v, pu,x AN xv n kaT and入 p T 2md2potal so that P√T e. Thus, temperature dependence is the biggest differentiator between the two c)Sketch the variation of the log of the Cvd growth rate as functions of the square root of the gas flow velocity and as a function of 1/T 5 points. Reaction regim Transport regime Reaction regime Transport regime 44 b) How would you distinguish between i) the reaction-limited and ii) a transport￾limited cases? 5 points. In the reaction-limited regime, the temperature dependence of the film growth rate exhibits Arrhenius behavior: ˜ ˜ ¯ ˆ Á Á Ë Ê - D µ ˜ ˜ ¯ ˆ Á Á Ë Ê - D = = k T G v k T G k k N kC v B B o g exp , exp In the transport-limited regime, the deposition rate is given by: v = 3lvxCg 4Nf x ru• x h , where vx = 2kBT pm , Cg Pg = 1 kBT , and l = kBT 2pd2 Ptotal so that v µ Pg T u• Thus, temperature dependence is the biggest differentiator between the two regimes. c) Sketch the variation of the log of the CVD growth rate as functions of the square root of the gas flow velocity and as a function of 1/T. 5 points. ln(v) u Transport regime Reaction regime 1/T ln(v) Transport regime Reaction regime