Fa2004 16.33315-5 TUNING FORK GY Ros MEMS ∈KPL0工 Ts CORLOLIS EFFE了 HE~A6RM雌GM55s06TEB 1 RATE OF RoTATIoN升6oU7 x s∥ PLANE OF V BRATioN → RIVe VI6 RATLONS工AoE DIRECTION ROTATON oF BA5R5υLTs TN ADDITUW A MBRATIONS CAN BE VERy SMALL vM0 EPENDENT→cA6H Image removed due to copyright considerationsImage removed due to copyright considerations. Fall 2004 16.333 15–5