Other methods of heating charge e-beam 多 B field Resistive heater RF-induction heater e 十 Can you suggest other methods? on beam aser: Pulsed Laser Deposition(PLD), laser ablation Irce Ion beam deposition (IB)D target keep substrate chamber at low P, bring in ion beam through differentially pumped path Substrate Can also use ion beam on film to add energy filr (ion beam assisted deposition, IBAD) Ion beam 6.152J3.155J6.152J/3.155J 14 Other methods of heating charge. Resistive heater I RF-induction heater e- + _  e-beam B field Can you suggest other methods? ‹ Laser: Pulsed Laser Deposition (PLD), laser ablation Ion beam deposition (IB)D: keep substrate chamber at low P, bring in ion beam through differentially pumped path. Source, target Substrate, film Ion beam ‹ Ion beam Can also use ion beam on film to add energy (ion beam assisted deposition, IBAD)