Laser Diode AFM/SEM systems often have References Position Sensitive reduced capabilities and typically Detectoz 1.Van Ardenne,M.(1938)Z. compromise the performance of Phys.109,407 Glass Cell both instruments. Cantilever/Tip 2.Goldstein,J.I.,Newbury, Summary D.E.,Echlin,P.,Joy,D.C.,Fiori, Flow-thrt SEM and AFM are complemen- C.,Lifshin,E.,Scanning Electron Fluid- Chamber tary techniques that provide a Microscopy and X-ray Mi- O-ring Seal more complete representation of a croanalysis,1981,Plenum surface when used together than if Publishing Corp.,New York,p.3. Cells or Molecules each were the only technique available.These techniques 3.Zworykin,V.K.,Hillier,J., Specimen overlap in their capabilities to Snyder,R.L.,(1942),ASTM provide nanometer scale lateral Bulletin 117,p.15. information.However,they Figure 16.Fluid cell for an AFM which allows imaging deviate in the fact that the afm 4.Binning G,Roher H,Gerber in an enclosed.liguid environment. can provide measurements in all C,Weibel E,"Surface Studies by three dimensions,including Scanning Tunneling Microscopy, height information with a vertical Phs.Reu.Let.49(1982)57. resolution of <0.5A,whereas the SEM has the ability to image very 5.Binnig G B,Quate C F,and rough samples due to its large Gerber Ch.,"Atomic Force depth of field and large lateral Microscope,"Phys,Rev.Lett.,12 field of view. (1986930 The SEM can provide elemental 6.Neves,B.R.A.,Salmon,M.E., analysis using X-ray detection, Russell,P.E.,Troughton,E.B. whereas the AFM can provide "Comparitive Study of Field compositional information based Emission-Scanning Electron on physical properties.The fact Microscopy and Atomic Force that the two techniques operate in Microscopy to Access Self- different environments can be a Assembled Monolayer Coverage strength when used together since on Any Type of Substrate," the AFM does not encounter Microscopy and Microanalysis 5 (1999)413. Figure 17.Image of two GroES molecules positioned vacuum issues(difficult sample side-by-side in physiologic fluid,demonstrating 10A preparation,sample modification, etc.)and may image samples in an 7.Castle,I.E.,Zhdan,P.A., lateral resolution and 1A vertical resolution.The entire molecule measures 84A across,and a distinct enclosed fluid or other environ- "Characterization of Surface 45A heptameric "crown"structure protrudes 8A above ment.The vacuum environment Topography by SEM and SFM: the remaining GroES surface and surrounds a central of the SEM makes it possible to Problems and Solutions,"J.Phys. depression.18nm scan.Image courtesy of Z.Shao. D:App Phys,.30(1997）722. University of Virginia.(18) conduct a number of techniques that require vacuum,such as X-ray analysis.By having both tech- 8.Lemoine,P.,Lamberton,R.W., niques side-by-side in an analytical Ogwu,A.A.,"Complementary facility,the overall scope of Analysis Techniques for the analytical capabilities is broad- Morphological Study of Ultrathin ened,adding to the flexibility of Amorphous Carbon Films,". the facility. App.Phs,86(1999)6564. 1010 Figure 16. Fluid cell for an AFM which allows imaging in an enclosed, liquid environment. Figure 17. Image of two GroES molecules positioned side-by-side in physiologic fluid, demonstrating 10Å lateral resolution and 1Å vertical resolution. The entire molecule measures 84Å across, and a distinct 45Å heptameric “crown” structure protrudes 8Å above the remaining GroES surface and surrounds a central depression. 18nm scan. Image courtesy of Z. Shao, University of Virginia. (18) AFM/SEM systems often have reduced capabilities and typically compromise the performance of both instruments. Summary SEM and AFM are complemen￾tary techniques that provide a more complete representation of a surface when used together than if each were the only technique available. These techniques overlap in their capabilities to provide nanometer scale lateral information. However, they deviate in the fact that the AFM can provide measurements in all three dimensions, including height information with a vertical resolution of <0.5Å, whereas the SEM has the ability to image very rough samples due to its large depth of field and large lateral field of view. The SEM can provide elemental analysis using X-ray detection, whereas the AFM can provide compositional information based on physical properties. The fact that the two techniques operate in different environments can be a strength when used together since the AFM does not encounter vacuum issues (difficult sample preparation, sample modification, etc.) and may image samples in an enclosed fluid or other environ￾ment. The vacuum environment of the SEM makes it possible to conduct a number of techniques that require vacuum, such as X-ray analysis. By having both tech￾niques side-by-side in an analytical facility, the overall scope of analytical capabilities is broad￾ened, adding to the flexibility of the facility. References 1. Van Ardenne, M. (1938) Z. Phys. 109, 407 2. Goldstein, J. I., Newbury, D.E., Echlin, P., Joy, D.C., Fiori, C., Lifshin, E., Scanning Electron Microscopy and X-ray Mi￾croanalysis, 1981, Plenum Publishing Corp., New York, p. 3. 3. Zworykin, V.K., Hillier, J., Snyder, R.L., (1942), ASTM Bulletin 117, p. 15. 4. Binning G, Roher H, Gerber C, Weibel E, “Surface Studies by Scanning Tunneling Microscopy,” Phys. Rev. Lett. 49 (1982) 57. 5. Binnig G B, Quate C F, and Gerber Ch., “Atomic Force Microscope,” Phys, Rev. Lett., 12 (1986) 930 6. Neves, B.R.A., Salmon, M.E., Russell, P.E., Troughton, E.B. “Comparitive Study of Field Emission-Scanning Electron Microscopy and Atomic Force Microscopy to Access Self￾Assembled Monolayer Coverage on Any Type of Substrate,” Microscopy and Microanalysis 5 (1999) 413. 7. Castle, J.E., Zhdan, P.A., “Characterization of Surface Topography by SEM and SFM: Problems and Solutions,” J. Phys. D: App Phys, 30 (1997) 722. 8. Lemoine, P., Lamberton, R.W., Ogwu, A.A., “Complementary Analysis Techniques for the Morphological Study of Ultrathin Amorphous Carbon Films,” J. App. Phys., 86 (1999) 6564. Laser Diode Position Sensitive Detector Oscillating Cantilever/Tip Flow-thru Fluid Chamber Cells or Molecules Glass Cell Sample or Specimen Support O-ring Seal