工程科学学报，第39卷，第2期：301-308.2017年2月 Chinese Journal of Engineering,Vol.39,No.2:301-308,February 2017 DOI:10.13374/j.issn2095-9389.2017.02.019;http://journals.ustb.edu.en 基于ASYS的新型聚合物石英压电传感器振动性能 分析 王南飞，李强，谷宇四 北京科技大学自动化学院，北京100083 ☒通信作者，E-mail:guyu@usth.cdu.cm 摘要新型聚合物石英压电传感器制备过程中，AT切型石英压电传感器基体的表面粗糙度及其基膜界面化学性质影响聚 合物薄膜的生长，导致聚合物薄膜厚度不均匀、表面存在缺陷，使得传感器采集的频率信号不稳定.本文建立了新型聚合物 石英压电传感器在考虑薄膜厚度不均、中心缺陷条件下的力学模型，利用ANSYS有限元软件对其进行模态分析，得到复杂条 件下传感器振动特性.模态分析结果发现，传感器固有频率值随聚合物薄膜缺陷的半径值增大呈现出从稳定到发散的趋势、 随薄膜的厚度值增大呈现出线性增大的趋势.研究结果表明，新型聚合物石英压电传感器的生产应确保薄膜厚度均匀且严 格控制中心缺陷半径小于0.5mm,该结果为制备稳定的新型聚合物石英压电传感器提供了重要依据. 关键词压电晶体：传感器：谐振频率：薄膜厚度；模态分析 分类号TH89:TH-39 Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS WANG Nan-fei,LI Qiang,GU Yu School of Automation and Electrical Engineering.University of Science and Technology Beijing,Beijing 100083,China Corresponding author,E-mail:guyu@ustb.edu.en ABSTRACT In the preparation process of novel polymer quartz piezoelectric sensors using AT-cut quartz substrates and polymer ma- terials,the roughness and the chemical characteristics of the substrate surface have a great influence on the production of the sensors. It could result in thickness-varied or defective films of the sensors,which make the sensor's frequency signals unstable.In this paper, a mechanical model of the sensor is presented,which takes into account the conditions that the film is thickness-varied and defective. The ANSYS software was used to obtain the vibration characteristics of the mechanical model under complex conditions by modal analy- sis.Results show that the natural frequency values of the sensor change from a stable state to a divergence state with the increase of the film defect in the radius,and the natural frequency values of the sensor increase linearly with increase of the thickness for the film.It indicates that the thickness of the film should be kept uniform and the defect radius should be limited within 0.5mm during producing the sensors.The results provide an important basis for producing the qualified polymer quartz piezoelectric sensors. KEY WORDS piezoelectric crystals;sensors;resonant frequency;coating thickness;modal analysis 新型石英压电传感器是近年来发展起来的一种基选择识别功能的薄膜材料作为敏感元件，并利用石英 于石英晶体微天平(quartz crystal microbalance,QCM) 压电传感器的压电特性，将石英压电传感器表面质量 原理1-)，通过在石英压电传感器表面修饰具有特异 变化转换为频率信号的高灵敏度的传感器.新型石英 收稿日期：2016-04-14 基金项目：国家高新技术研究发展计划资助项目(2013AA030901)工程科学学报,第 39 卷,第 2 期:301鄄鄄308,2017 年 2 月 Chinese Journal of Engineering, Vol. 39, No. 2: 301鄄鄄308, February 2017 DOI: 10. 13374 / j. issn2095鄄鄄9389. 2017. 02. 019; http: / / journals. ustb. edu. cn 基于 ANSYS 的新型聚合物石英压电传感器振动性能 分析 王南飞, 李 强, 谷 宇苣 北京科技大学自动化学院, 北京 100083 苣 通信作者, E鄄mail: guyu@ ustb. edu. cn 摘 要 新型聚合物石英压电传感器制备过程中,AT 切型石英压电传感器基体的表面粗糙度及其基膜界面化学性质影响聚 合物薄膜的生长,导致聚合物薄膜厚度不均匀、表面存在缺陷,使得传感器采集的频率信号不稳定. 本文建立了新型聚合物 石英压电传感器在考虑薄膜厚度不均、中心缺陷条件下的力学模型,利用 ANSYS 有限元软件对其进行模态分析,得到复杂条 件下传感器振动特性. 模态分析结果发现,传感器固有频率值随聚合物薄膜缺陷的半径值增大呈现出从稳定到发散的趋势、 随薄膜的厚度值增大呈现出线性增大的趋势. 研究结果表明,新型聚合物石英压电传感器的生产应确保薄膜厚度均匀且严 格控制中心缺陷半径小于 0郾 5 mm,该结果为制备稳定的新型聚合物石英压电传感器提供了重要依据. 关键词 压电晶体; 传感器; 谐振频率; 薄膜厚度; 模态分析 分类号 TH89; TH鄄39 收稿日期: 2016鄄鄄04鄄鄄14 基金项目: 国家高新技术研究发展计划资助项目(2013AA030901) Influence of polymer coating dimension variation on the resonant frequency of polymer quartz piezoelectric crystal sensors based on ANSYS WANG Nan鄄fei, LI Qiang, GU Yu 苣 School of Automation and Electrical Engineering, University of Science and Technology Beijing, Beijing 100083, China 苣 Corresponding author, E鄄mail: guyu@ ustb. edu. cn ABSTRACT In the preparation process of novel polymer quartz piezoelectric sensors using AT鄄cut quartz substrates and polymer ma鄄 terials, the roughness and the chemical characteristics of the substrate surface have a great influence on the production of the sensors. It could result in thickness鄄varied or defective films of the sensors, which make the sensor爷s frequency signals unstable. In this paper, a mechanical model of the sensor is presented, which takes into account the conditions that the film is thickness鄄varied and defective. The ANSYS software was used to obtain the vibration characteristics of the mechanical model under complex conditions by modal analy鄄 sis. Results show that the natural frequency values of the sensor change from a stable state to a divergence state with the increase of the film defect in the radius, and the natural frequency values of the sensor increase linearly with increase of the thickness for the film. It indicates that the thickness of the film should be kept uniform and the defect radius should be limited within 0郾 5 mm during producing the sensors. The results provide an important basis for producing the qualified polymer quartz piezoelectric sensors. KEY WORDS piezoelectric crystals; sensors; resonant frequency; coating thickness; modal analysis 新型石英压电传感器是近年来发展起来的一种基 于石英晶体微天平( quartz crystal microbalance, QCM) 原理[1鄄鄄3] ,通过在石英压电传感器表面修饰具有特异 选择识别功能的薄膜材料作为敏感元件,并利用石英 压电传感器的压电特性,将石英压电传感器表面质量 变化转换为频率信号的高灵敏度的传感器. 新型石英