Vol.18 No.5 王建军等：低温沉积金刚石薄膜的红外光学性能 ·423· 红外光学窗口和其它器件的使用要求. 参考文献 1 Liou Y,Weimer R,Knight D.Messier R.Effect of Oxygen in Diamond Deposition at Low Substrate Temperature.Appl Phys Lett,1990,56:437~439 2 Muranaka Y,Yamashita H,Miyadera H.Worldwide Status of Low-Temperature Growth of Diamond. Diamond Films and Technology,1995.5(1):1~15 3吕反修，杨保雄，蒋高松.MPCVD低温沉积金刚石薄膜及其特征.北京科技大学学报，1992,14(2)：168~ 172 4杨保雄，蒋高松，吕反修.氧在金刚石薄膜低温沉积中的作用.薄膜科学与技术，1992，(3)：24~29 5 Wang J J,Lu F X,Yu W X,Tong Y M.Effect of Negative Bias on Diamond Nucleation.Journal of University of Science and Technology Beijing,1996,3(1):12~16 6 Yugo S,Kimura T,Kanai T.Nucleation Mechanisms of Diamond in Plasma Chemical Vapor Deposition.Diamond and Related Materials,1992 (2):328~332 7 Yugo S,kani T,Kimura T,Muto T.Generation of Diamond Nuclei by Electric Field in Plasma Chemical Vapor Deposition.Appl Phys Lett,1991,58(10):1036 8 Couder P,Catherine Y.Structure and Physical Properties of Plasma-Grown Amorphous Hydrogenated Carbon Films.Thin Solid Films,1987,146 93 107 9 Rancourt J D.Optical Thin Films.New York:Macmillan Publication Co,1987.54 Infrared Optical Properties of Diamond Films Deposited at Low Temperatures Wang Jianjun Lu Fanxiu Department of Materials Science and Engineering,USTB,Beijing 100083,PRC ABSTRACT Optical smooth diamond films have been deposited at low temperatures (400 ~700 C)and their IR properties were studied for infrared optical coating applications. High density diamond nucleation was realized by a "Two Step Process"in which a high methane concentration was used for nucleation enhancement.However,biasing was shown insufficient for nucleation enhancement at low temperatures.Transmittance as high as 80% for diamond coated single crystal silicon wafer was observed.This level of IR transmis- sion is good enough for practical applications of Si windows in a severe atmosphere. KEY WORDS diamond film,low temperature deposition,infrared opticsV o l . 18 N o . 5 王 建军等 : 低温沉积金刚石薄膜的红外光学性能 . 4 2 3 . 红外 光学 窗 口 和 其它 器件 的使 用 要求 . 参 考 文 献 1 L i o u Y , W e im e r R , K l l ig h t D , M e s s i e r R . E fe e t o f o x y g e n i n D i a m o n d D e P o s i ti o n a t L o w S u b s atr t e T e m P e ar tu re . A PP I Ph y s L e t , 19 9 0 , 5 6 : 4 3 7 一 4 3 9 2 M u arn ak a Y , Y a m a s h iat H , M iy ad e ar H . Wo r ldw id e S at tu s o f L o w 一 T e m Pe r a tu r e G r o w ht o f D i a m o n d . D i a m o n d F il m s an d T e e hn o ol g y , 1 9 9 5 , 5 ( l ) : l 一 1 5 3 吕 反修 , 杨保雄 , 蒋 高松 . M P C V D 低 温沉积金刚石薄膜及其特征 . 北京 科技大学学报 , 19 9 2 , 14 (2) : 168 一 1 7 2 4 杨保雄 , 蒋 高松 , 吕 反修 . 氧在金 刚石薄膜低 温沉 积中的作用 . 薄膜科 学与技术 , 19 92 , (3) : 2 4 一 2 9 5 W an g J J , L u F X , Y u W X , T o n g Y M . E fe e t o f N e g a ti v e B i a s o n D i a m o n d N u e l e at i o n . J o urn a l o f U n i v e r s ity o f S e i e n e e a n d T e e h n o l o g y B e ij i n g , 19 9 6 , 3 ( l ) : 1 2 一 16 6 Y u g o S , K im ur a T , K a n a i T . N u e l e a t i o n M e e h a n i s m s o f D i a m o n d 一n P l a s m a C h e m i e a l V a P o r D e p o s i ti o n . D i a m o n d a n d R e l a t e d M a t e r i a l s , 19 9 2 ( 2 ) : 3 2 8 一 3 3 2 7 Y u g o S , k a n i T , K im ur a T , M u t o T . G e n e ar ti o n o f D i a m o n d N u e l e i b y E l e e tr i e F一e ld i n P l a s m a C h e m i e a l V aP o r D e P o s i t i o n . A P PI P h y s L e t , 1 9 9 1 , 5 8 ( 1 0 ) : 1 0 3 6 8 C o u d e r P , C a t h e r i n e Y . S tUT e utr e a n d Ph y s l e a l Pr o P e rt i e s o f P l a s m a 一 G r o w n A m o pr h o u s H y dr o g e n a t e d C a br o n F i ln s . T h i n S o li d F i ln s , 19 8 7 , 14 6 : 9 3 一 1 0 7 9 aR n e o u rt J D . O Pt i e a l T h i n F ilm s . N e w Y o rk : M a e m i ll a n P u b li c a t i o n C o , 1 9 8 7 . 5 4 I n fr a r e d O P ti e a l P r o P e rt i e s o f D i a m o n d F i lm s D e P o s i t e d a t L o w T e m P e r a tu r e s 环尸 d n g 了i a nj un L u aF xn iu D e P art m e n t o f M a t e r , a l s S e i e n e e a n d E n g , n e e r i n g , U S T B , B e ij i n g 10 0 0 8 3 , P R C A B S T R A C T O P t i e a l s m o o ht d i a m o n d if lm s h a v e b e e n d e P o s i t e d a t l o w t e m P e r a tu r e s ( 4 0 0 一 7 0 0 0C ) a n d ht e i r I R p r o p e rt i e s w e r e s tu d i e d of r i n fr a r e d o p t i c a l e o a t i n g a p p li e a t i o n s . H i g h d e n s i ty d i a m o n d n u e l e a t i o n w a s r e a l i z e d b y a “ T w o S t e P P r o e e s s ” i n w h i e h a h ig h m e ht a n e c o n e e n tr a t i o n w a s u s e d of r n u e l e a t i o n e n h a n e e m e n t . H o w e v e r , b i a s i n g w a s s h o w n i n s u if e i e n t fo r n u e l e at i o n e n h an e e m e n t a t l o w t e m P e r a ut r e s . T r a n s m i t an e e a s h i g h a s 8 0 % fo r d i a m o n d e o a t e d s i n g l e e yr s t a l s i li e o n w a fe r w a s o b s e vr e d . T h i s l e v e l o f I R tr a n s m i s - s i o n 1 5 g o o d e n o u g h fo r P r a c t i e a l a P P li c a t i o n s o f 5 1 w i n d o w s in a s e v e r e a t m o s P h e r e . K E Y WO R D S d i a m o n d if lm , l o w te m P e r a ut r e d e P o s i t i o n , i n fr a r e d o P t i c s