Massachusetts Institute of Technology 3.155J/6.152J Microelectronics Processing Technology Fall Term 2003 Problem set 5: Etching Out: October 29 2003 Due: November 5. 2003 All the questions are from Plummer, Chapter 10, p.679-680, which was handed out in class 1)Question 10.3 2) Question 10.4 3)Question 10.5 4) Question 10.6 5)Question 10.8Massachusetts Institute of Technology 3.155J / 6.152J Microelectronics Processing Technology Fall Term 2003 Problem Set 5: Etching Out: October 29, 2003 Due: November 5, 2003 All the questions are from Plummer, Chapter 10, p.679-680, which was handed out in class. 1) Question 10.3 2) Question 10.4 3) Question 10.5 4) Question 10.6 5) Question 10.8