ultramicroscopy ELSEVIER Ultramicroscopy 82(2000)57-61 Www Whisker probes E.I. Givargizov., A.N. Stepanova, L N. Obolenskaya, E.S. Mashkova V A. Molchanov, M.E. Givargizov, I.W. Rangelow Institute of Crystallography, Russian Academy of Sciences, Leninsky pr. 59, 117333 Moscow, Russia Nuclear Physics Institute, Moscow Unicersity, Moscow, Russia "Crystals and Technology, Ltd, Moscow, Russia University of Kassel, Kassel, Germany Received 31 May 1999, received in revised form 12 August 1999 Abstract a new technology for preparation of AFM probes based on whiskers is proposed. The technology posseses significant advantages to the whisker probes over standard ones as related to the shapes of the probes, as well as to the properties of the cantilevers on which the whiskers are grown. 2000 Elsevier Science B.V. All rights reserved. 1. Introduction monly used. The probes are prepared by means of a photolithographic process. Principal drawbacks Since the beginning of 1980s, when scanning tun- of the probes are large angles at their apex: about neling microscopy based on tip probe has been 110 of the silicon nitride and 20-30 of the silicon discovered and introduced into scientific and in- probes. This limits the use of the probes for studies dustrial practice, the number of its"children"has of samples with coarse surfaces, for studies of biolo- been increased and continue to increase. Currently, gical macromolecules, for trench profiling, etc more than ten different versions of scanning probe In this work, we propose to prepare silicon devices are now used. Of the versions, atomic probes from silicon whiskers that can be control- force microscopes(AFM) are most valuable and lably grown on silicon cantilevers having special crystallographic orientation a tip probe is a key component of all scanning litically formed on a special console, or lever-So- 2. Experimentals called cantilever. Probes of silicon nitride(Si3 N4) and of single-crystalline silicon are now most com- Silicon whiskers are grown by the vapor liquid-solid mechanism [1-3] using gold as liquid- forming agent. The growth process consists in the following Gold particles are deposited on a silicon Corresponding author. Fax: + 7-095-330-8265 substrate having the crystallographic orientation E-mail address: givargiz(@cvdlab incr msk.su(E.. Givargizov) (11 1)by a photolithographic procedure. The 0304-3991 /00/Ssee front matter c 2000 Elsevier Science B v. All rights reserved. PI:s0304-3991(99)00141-2* Corresponding author. Fax:#7-095-330-8265. E-mail address: givargiz@cvdlab.incr.msk.su (E.I. Givargizov) Ultramicroscopy 82 (2000) 57}61 Whisker probes E.I. Givargizov!,*, A.N. Stepanova!, L.N. Obolenskaya!, E.S. Mashkova", V.A. Molchanov", M.E. Givargizov#, I.W. Rangelow$ !Institute of Crystallography, Russian Academy of Sciences, Leninsky pr. 59, 117333 Moscow, Russia "Nuclear Physics Institute, Moscow University, Moscow, Russia #Crystals and Technology, Ltd., Moscow, Russia $University of Kassel, Kassel, Germany Received 31 May 1999; received in revised form 12 August 1999 Abstract A new technology for preparation of AFM probes based on whiskers is proposed. The technology posseses signi"cant advantages to the whisker probes over standard ones as related to the shapes of the probes, as well as to the properties of the cantilevers on which the whiskers are grown. ( 2000 Elsevier Science B.V. All rights reserved. 1. Introduction Since the beginning of 1980s, when scanning tun￾neling microscopy based on tip probe has been discovered and introduced into scienti"c and in￾dustrial practice, the number of its `childrena has been increased and continue to increase. Currently, more than ten di!erent versions of scanning probe devices are now used. Of the versions, atomic force microscopes (AFM) are most valuable and numerous. A tip probe is a key component of all scanning probe devices. In the AFMs, the probes are mono￾litically formed on a special console, or lever } so￾called cantilever. Probes of silicon nitride (Si3 N4 ) and of single-crystalline silicon are now most com￾monly used. The probes are prepared by means of a photolithographic process. Principal drawbacks of the probes are large angles at their apex: about 1103 of the silicon nitride and 20}303 of the silicon probes. This limits the use of the probes for studies of samples with coarse surfaces, for studies of biolo￾gical macromolecules, for trench pro"ling, etc. In this work, we propose to prepare silicon probes from silicon whiskers that can be control￾lably grown on silicon cantilevers having special crystallographic orientation. 2. Experimentals Silicon whiskers are grown by the vapor} liquid}solid mechanism [1}3] using gold as liquid￾forming agent. The growth process consists in the following. Gold particles are deposited on a silicon substrate having the crystallographic orientation (1 1 1) by a photolithographic procedure. The 0304-3991/00/$ - see front matter ( 2000 Elsevier Science B.V. All rights reserved. PII: S 0 3 0 4 - 3 9 9 1 ( 9 9 ) 0 0 1 4 1 - 2