Outline The lithographic Process a BasIc process Definitions Fundamentals of Exposure Exposure Systems Resists Advanced Lithography Recommended reading Plummer, chapter 5 Other: Campbell, Chapter 7, 8,9 Fall 2003-MA Schmidt 315516.152]- Lecture10-side2Outline „ The Lithographic Process „ Basic Process „ Definitions „ Fundamentals of Exposure „ Exposure Systems „ Resists „ Advanced Lithography „ Recommended reading „ Plummer, Chapter 5 „ Other: Campbell, Chapter 7,8,9 Fall 2003 – M.A. Schmidt 3.155J/6.152J – Lecture 10 – Slide 2