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·380 工程科学学报,第40卷,第3期 动速度和脉冲频率等工艺参数,确定出较为理想的 [8]Wei C,Qin H T,Chiu C P,et al.Drop-on-demand Eijet printing 喷印工艺窗口,其中优化出工艺参数:电压1500V, of continuous interconnects with AC-pulse modulation on highly in- 喷嘴与基底距离0.3mm,占空比57%,工作台移动 sulating substrates.J Manuf Syst,2015,37(2):505 Rahman K,Ali K,Muhammad N M,et al.Fine resolution drop- 速度110mms-,脉冲频率1200Hz.最终采用内径 on-demand electrohydrodynamic patterning of conductive silver 为60μm喷嘴实现了最小线宽3μm打印以及微尺 tracks on glass substrate.Appl Phys A,2012,111 (2):593 度图案打印. [0]Kim Y,Jang S,Oh J H.High-tesolution electrohydrodynamic printing of silver nanoparticle ink via commercial hypodermic nee- 参考文献 dles.Appl Phys Lett,2015,106(1):1261 [1]Lan H B.Li D C,Lu B H.Micro and nano scale 3D printing.Sci [11]Huang F L,Sun Q,Zhang L B,et al.Overview on the micropat- Sin Technol,2015,45(9):919 terned printing method by near-field electrohydrodynamic cone (兰红波,李涤尘,卢秉恒.微纳尺度3D打印.中国科学:技 jet.Mech Electr Eng Technol,2017,46(2):58 术科学,2015,45(9):919) (黄风立,孙权,张礼兵,等。近场电流体动力锥射流微图案 Yudistira H T,Tenggara A P,Oh S S,et al.High-esolution 化打印方法研究综述.机电工程技术,2017,46(2):58) [12]Park J,Park J W,Nasrabadi A M,et al.Methodology to set up electrohydrodynamic jet printing for the direct fabrication of 3D multilayer terahertz metamaterial of high refractive index.Micro- noeubtrate gap for high resolution electrohydrodynamic jet mech Microeng,2015,25(4):0450061 printing.Appl Phys Lett,2016,109(13)134104 B]Onses M S,Sutanto E,Ferreira P M,et al.Mechanisms,capa- 03] Zhao X,He J K,Xu F Y,et al.Electrohydrodynamic printing: bilities,and applications of high-resolution electrohydrodynamic jet a potential tool for high-resolution hydrogel/cell patterning.Virtu- printing.Small,2015,11(34):4237 al Phys Prototyping,2016,11(1)57 4]Lee A,Jin H,Dang H W,et al.Optimization of experimental pa- [14]Korvink J G,Smith P J,Shin D Y.Inkjet-Based Micromanufac- rameters to determine the jetting regimes in electrohydrodynamic turing.Hoboken:Wiley-VCH Verlag GmbH Co,2012 printing.Langmuir,2013,29(44):13630 [15]Park J,Kim B,Kim S,et al.Prediction of drop-on-demand [5]Park J U,Hardy M,Kang S J,et al.High-resoluting eletrohydro- (DOD)pattern size in pulse voltage-pplied electrohydrodynamic dynamic jet printing.Nat Mater,2007,6(10):782 (EHD)jet printing of Ag colloid ink.Appl Phys A,2014,117: [6]Yang J J,Zhang Z Y,Lan H B,et al.Jetting mechanism and 2225 rules of micro scale 3D printing based on EHD.T Chin Soc Agric [16]Gao F Q,Sonin AA.Precise doposition of molten microdrops: Mach,2016,47(6):401 the physics of digital microfabrication.Proc R Soc A,1994,444 (1922):533 (杨建军,张志远,兰红波,等.基于EHD微尺度3D打印喷 射机理与规律研究.农业机械学报,2016,47(6):401) 17]Li JL Electrospray.Shanghai:Shanghai Jiao Tong University ]Choi K J,Rahman K,Muhammad N M,et al.Electrohydrody- Press,2012 (李建林.电场喷射.上海:上海交通大学出版社,2012) namic inkjet-micro pattem fabrication for printed electronics appli- cations /Recent Advances in Nanofabrication Techniques and Ap- [18]Taylor G.Disintegration of water drops in an electric field.Pro R Soc London Ser A,1964,280(1382)383 plications [2017-05-31]https:/www.intechopen.com/books/ [19]Hayati I,Baikey A I,Tadros T F.Mechanism of stable jet for- recent-advances-in-nanofabrication-echniques-and-applications/ electrohydrodynamic-inkjet-micro-pattern-fabrication-for-printed mation in electrohydrodynamic atomization.Nature,1986,319 (6048):41 lectronics-pplications工程科学学报,第 40 卷,第 3 期 动速度和脉冲频率等工艺参数,确定出较为理想的 喷印工艺窗口,其中优化出工艺参数: 电压 1500 V, 喷嘴与基底距离 0. 3 mm,占空比 57% ,工作台移动 速度 110 mm·s - 1,脉冲频率 1200 Hz. 最终采用内径 为 60 μm 喷嘴实现了最小线宽 3 μm 打印以及微尺 度图案打印. 参 考 文 献 [1] Lan H B,Li D C,Lu B H. Micro and nano scale 3D printing. Sci Sin Technol,2015,45( 9) : 919 ( 兰红波,李涤尘,卢秉恒. 微纳尺度 3D 打印. 中国科学: 技 术科学,2015,45( 9) : 919) [2] Yudistira H T,Tenggara A P,Oh S S,et al. High-resolution electrohydrodynamic jet printing for the direct fabrication of 3D multilayer terahertz metamaterial of high refractive index. J Micro￾mech Microeng,2015,25( 4) : 045006-1 [3] Onses M S,Sutanto E,Ferreira P M,et al. Mechanisms,capa￾bilities,and applications of high-resolution electrohydrodynamic jet printing. Small,2015,11( 34) : 4237 [4] Lee A,Jin H,Dang H W,et al. Optimization of experimental pa￾rameters to determine the jetting regimes in electrohydrodynamic printing. Langmuir,2013,29( 44) : 13630 [5] Park J U,Hardy M,Kang S J,et al. High-resoluting eletrohydro￾dynamic jet printing. Nat Mater,2007,6( 10) : 782 [6] Yang J J,Zhang Z Y,Lan H B,et al. Jetting mechanism and rules of micro scale 3D printing based on EHD. T Chin Soc Agric Mach,2016,47( 6) : 401 ( 杨建军,张志远,兰红波,等. 基于 EHD 微尺度 3D 打印喷 射机理与规律研究. 农业机械学报,2016,47( 6) : 401) [7] Choi K J,Rahman K,Muhammad N M,et al. Electrohydrody￾namic inkjet-micro pattern fabrication for printed electronics appli￾cations / / Recent Advances in Nanofabrication Techniques and Ap￾plications [2017--05--31] https: / /www. intechopen. com / books/ recent-advances-in-nanofabrication-techniques-and-applications/ electrohydrodynamic-inkjet-micro-pattern-fabrication-for-printed-e￾lectronics-applications [8] Wei C,Qin H T,Chiu C P,et al. Drop-on-demand E-jet printing of continuous interconnects with AC-pulse modulation on highly in￾sulating substrates. J Manuf Syst,2015,37( 2) : 505 [9] Rahman K,Ali K,Muhammad N M,et al. Fine resolution drop￾on-demand electrohydrodynamic patterning of conductive silver tracks on glass substrate. Appl Phys A,2012,111( 2) : 593 [10] Kim Y,Jang S,Oh J H. High-resolution electrohydrodynamic printing of silver nanoparticle ink via commercial hypodermic nee￾dles. Appl Phys Lett,2015,106( 1) : 1261 [11] Huang F L,Sun Q,Zhang L B,et al. Overview on the micropat￾terned printing method by near-field electrohydrodynamic cone jet. Mech Electr Eng Technol,2017,46( 2) : 58 ( 黄风立,孙权,张礼兵,等. 近场电流体动力锥射流微图案 化打印方法研究综述. 机电工程技术,2017,46( 2) : 58) [12] Park J,Park J W,Nasrabadi A M,et al. Methodology to set up nozzle-to-substrate gap for high resolution electrohydrodynamic jet printing. Appl Phys Lett,2016,109( 13) : 134104 [13] Zhao X,He J K,Xu F Y,et al. Electrohydrodynamic printing: a potential tool for high-resolution hydrogel /cell patterning. Virtu￾al Phys Prototyping,2016,11( 1) : 57 [14] Korvink J G,Smith P J,Shin D Y. Inkjet-Based Micromanufac￾turing. Hoboken: Wiley-VCH Verlag GmbH & Co,2012 [15] Park J,Kim B,Kim S,et al. Prediction of drop-on-demand ( DOD) pattern size in pulse voltage-applied electrohydrodynamic ( EHD) jet printing of Ag colloid ink. Appl Phys A,2014,117: 2225 [16] Gao F Q,Sonin A A. Precise doposition of molten microdrops: the physics of digital microfabrication. Proc R Soc A,1994,444 ( 1922) : 533 [17] Li J L. Electrospray. Shanghai: Shanghai Jiao Tong University Press,2012 ( 李建林. 电场喷射. 上海: 上海交通大学出版社,2012) [18] Taylor G. Disintegration of water drops in an electric field. Proc R Soc London Ser A,1964,280( 1382) : 383 [19] Hayati I,Baikey A I,Tadros T F. Mechanism of stable jet for￾mation in electrohydrodynamic atomization. Nature,1986,319 ( 6048) : 41 · 083 ·
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