Bulk silicon EMS Devices 100N 726Ku oot Magn WD 070 130 IMT- SAMLAB Single-axis tilt-mirror photo courtesy r Conant, BSAC Comb-drive switch photo courtesy IMT(Neuchatel)“Bulk Silicon” MEMS Devices Single-axis tilt-mirror photo courtesy R. Conant, BSAC Comb-drive switch photo courtesy IMT (Neuchatel)