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刘芬等:射频磁控溅射制备(n,Co)共掺ZnO薄膜的电学和磁学性质 391· properties of ZnO based diluted magnetic semiconductor nanorods. charge carrier-mediated ferromagnetic coupling.Chem Mater, RSC Ad,2019,9(57):33207 2019,31(19:8191 [12]Zhong M,Wang S W,Li Y,et al.Room temperature ferromagnetic [24]Wang X T,Zhu L P,Zhang L Q,et al.Properties of Ni doped and Cr-Ni codoped ZnO diluted magnetic semiconductors synthesized Ni-Ga co-doped Zno thin films prepared by pulsed laser by hydrothermal method under high pulsed magnetic field.Ceram deposition.JAlloys Compd,2011,509(7):3282 m,2015,41(1):451 [25]Liu Q Y.Yang P.First-principles study on ZnO-based diluted [13]Wang X T,Zhu L P.Ye Z G,et al.Influence of N dopant on the magnetic semiconductors in different doping configurations. electric and magnetic properties of Co doped ZnO thin films.J Electron Sci Technol,2018,31(2):44 Inorg Mater,.2010,25(7):711 (刘乔亚,杨平.不同构型下ZO基稀磁半导体的第一性原理研 (王雪涛,朱丽萍,叶志高,等.N掺杂对Co一ZO薄膜电学和磁学 究.电子科技,2018,31(2):44) 性能的影响.无机材料学报,2010,25(7):711) [26]Luthra A V.Tweaking electrical and magnetic properties of Al-Ni [14]Liu Z H,Wang X L,Ji J Z,et al.Influence of photoelectric co-doped ZnO nanopowders.Ceram Int,2014,40(9):14927 parameters for AZO transparent conductive films on electroma- [27]Henni A,Merrouche A,Telli L,et al.Studies on the structural, gnetic scattering characteristics.ChinJ Eng,2018,40(10):1259 morphological,optical and electrical properties of Al-doped Zno (刘战合,王晓璐,姬金祖,等.AZO透明导电膜电磁散射光电参 nanorods prepared by electrochemical deposition.J Electroanal 数影响试验.工程科学学报,2018.40(10):1259) Chem,2016,763:149 [15]Zang Z G.Efficiency enhancement of ZnO/Cu,O solar cells with [28]Yoo R,Cho S,Song M J,et al.Highly sensitive gas sensor based well oriented and micrometer grain sized CuO films.App/Phys on Al-doped Zno nanoparticles for detection of dimethyl Let,2018,112(4):042106 methylphosphonate as a chemical warfare agent simulant.Sens [16]Li C L,Zang Z G,Han C,et al.Highly compact CsPbBr3 Actuators B,2015,221:217 perovskite thin films decorated by ZnO nanoparticles for enhanced [29]Sun H,Chen S C,Wang C H,et al.Electrical and magnetic random lasing.Nano Energy,2017,40:195 properties of (Al,Co)co-doped Zno films deposited by RF [17]Sluiter M H F,Kawazoe Y,Sharma P,et al.First principles based magnetron sputtering.SurfCoat Technol,2019,359:390 design and experimental evidence for a ZnO-based ferromagnet at [30]Shannon R D.Revised effective ionic radii and systematic studies room temperature.Phys Rey Lett,2005,94(18):187204 of interatomic distances in halides and chalcogenides.Acta Cryst, [18]Zong Y.Sun Y,MengS Y,et al.Doping effect and oxygen defects 1976,32:751 boost room temperature ferromagnetism of Co-doped Zno [31]Lu Z L,Hsu H S,Tzeng Y H,et al.Tunable magnetic and nanoparticles:experimental and theoretical studies.RSC Adv transport properties of single crystalline (Co,Ga)-codoped ZnO 2019,940):23012 flms.4 ppl Phys Lett,.2009,95(6):062509 [19]Dinia A,Schmerber G,Meny C,et al.Room-temperature [32]Chen S C,Wang C H,Sun H,et al.Microstructure,electrical and ferromagnetism in Zn-Co,O magnetic semiconductors prepared magnetic properties of(Ga,Co)-ZnO films by radio frequency by sputtering.JApp/Phys,2005,97(12):123908 magnetron co-sputtering.SufCoat Technol,2016,303:203 [20]Shatnawi M,Alsmadi A M,Bsoul I,et al.Magnetic and optical [33]Coey J M D,Venkatesan M,Fitzgerald C B.Donor impurity band properties of Co-doped ZnO nanocrystalline particles.JA/loys exchange in dilute ferromagnetic oxides.Nat Mater,2005,4:173 Compd,.2016,655:244 [34]Dietl T,Ohno H,Matsukura F,et at.Zener model description of [21]Siddheswaran R,Mangalaraja R V,Gomez M E,et al.Room ferromagnetism in zinc-blende magnetic semiconductors.Science, temperature ferromagnetism in combustion synthesized 2000,287(5455:1019 nanocrystalline Co,Al co-doped ZnO.JAlloys Compd,2013,581: [35]Griffin K A,Pakhomov A B,Wang C M,et al.Intrinsic 146 ferromagnetism in insulating cobalt doped anatase TiO2.Phys Rev [22]Kumar S,Tripathi D M,Vaibhay P,et al.Effect of Al and Fe LetL,2005,94(15):157204 doping in Zno on magnetic and magneto-transport properties. [36]Behan A J,Mokhtari A,Blythe H J,et al.Two magnetic regimes Magn Magn Mater,2016,419:68 in doped ZnO corresponding to a dilute magnetic semiconductor [23]Paul S,Dalal B.Das M,et al.Enhanced magnetic properties of In- and a dilute magnetic insulator.Phys Rev Lett,2008,100(4): Mn-codoped plasmonic ZnO nanoflowers:evidence of delocalized 047206properties of ZnO based diluted magnetic semiconductor nanorods. RSC Adv, 2019, 9(57): 33207 Zhong M, Wang S W, Li Y, et al. Room temperature ferromagnetic Cr-Ni codoped ZnO diluted magnetic semiconductors synthesized by hydrothermal method under high pulsed magnetic field. Ceram Int, 2015, 41(1): 451 [12] Wang X T, Zhu L P, Ye Z G, et al. Influence of N dopant on the electric and magnetic properties of Co doped ZnO thin films. J Inorg Mater, 2010, 25(7): 711 (王雪涛, 朱丽萍, 叶志高, 等. N掺杂对Co−ZnO薄膜电学和磁学 性能的影响. 无机材料学报, 2010, 25(7):711) [13] Liu Z H, Wang X L, Ji J Z, et al. Influence of photoelectric parameters for AZO transparent conductive films on electroma￾gnetic scattering characteristics. Chin J Eng, 2018, 40(10): 1259 (刘战合, 王晓璐, 姬金祖, 等. AZO透明导电膜电磁散射光电参 数影响试验. 工程科学学报, 2018, 40(10):1259) [14] Zang Z G. Efficiency enhancement of ZnO/Cu2O solar cells with well oriented and micrometer grain sized Cu2O films. Appl Phys Lett, 2018, 112(4): 042106 [15] Li C L, Zang Z G, Han C, et al. Highly compact CsPbBr3 perovskite thin films decorated by ZnO nanoparticles for enhanced random lasing. Nano Energy, 2017, 40: 195 [16] Sluiter M H F, Kawazoe Y, Sharma P, et al. First principles based design and experimental evidence for a ZnO-based ferromagnet at room temperature. Phys Rev Lett, 2005, 94(18): 187204 [17] Zong Y, Sun Y, Meng S Y, et al. Doping effect and oxygen defects boost room temperature ferromagnetism of Co-doped ZnO nanoparticles: experimental and theoretical studies. RSC Adv, 2019, 9(40): 23012 [18] Dinia A, Schmerber G, Meny C, et al. Room-temperature ferromagnetism in Zn1−xCoxO magnetic semiconductors prepared by sputtering. J Appl Phys, 2005, 97(12): 123908 [19] Shatnawi M, Alsmadi A M, Bsoul I, et al. Magnetic and optical properties of Co-doped ZnO nanocrystalline particles. J Alloys Compd, 2016, 655: 244 [20] Siddheswaran R, Mangalaraja R V, Gomez M E, et al. Room temperature ferromagnetism in combustion synthesized nanocrystalline Co, Al co-doped ZnO. J Alloys Compd, 2013, 581: 146 [21] Kumar S, Tripathi D M, Vaibhav P, et al. Effect of Al and Fe doping in ZnO on magnetic and magneto-transport properties. J Magn Magn Mater, 2016, 419: 68 [22] Paul S, Dalal B, Das M, et al. Enhanced magnetic properties of In￾Mn-codoped plasmonic ZnO nanoflowers: evidence of delocalized [23] charge carrier-mediated ferromagnetic coupling. Chem Mater, 2019, 31(19): 8191 Wang X T, Zhu L P, Zhang L Q, et al. Properties of Ni doped and Ni-Ga co-doped ZnO thin films prepared by pulsed laser deposition. J Alloys Compd, 2011, 509(7): 3282 [24] Liu Q Y, Yang P. First-principles study on ZnO-based diluted magnetic semiconductors in different doping configurations. Electron Sci Technol, 2018, 31(2): 44 (刘乔亚, 杨平. 不同构型下ZnO基稀磁半导体的第一性原理研 究. 电子科技, 2018, 31(2):44) [25] Luthra A V. Tweaking electrical and magnetic properties of Al-Ni co-doped ZnO nanopowders. Ceram Int, 2014, 40(9): 14927 [26] Henni A, Merrouche A, Telli L, et al. Studies on the structural, morphological, optical and electrical properties of Al-doped ZnO nanorods prepared by electrochemical deposition. J Electroanal Chem, 2016, 763: 149 [27] Yoo R, Cho S, Song M J, et al. Highly sensitive gas sensor based on Al-doped ZnO nanoparticles for detection of dimethyl methylphosphonate as a chemical warfare agent simulant. Sens Actuators B, 2015, 221: 217 [28] Sun H, Chen S C, Wang C H, et al. Electrical and magnetic properties of (Al, Co) co-doped ZnO films deposited by RF magnetron sputtering. Surf Coat Technol, 2019, 359: 390 [29] Shannon R D. Revised effective ionic radii and systematic studies of interatomic distances in halides and chalcogenides. Acta Cryst, 1976, 32: 751 [30] Lu Z L, Hsu H S, Tzeng Y H, et al. Tunable magnetic and transport properties of single crystalline (Co, Ga)-codoped ZnO films. Appl Phys Lett, 2009, 95(6): 062509 [31] Chen S C, Wang C H, Sun H, et al. Microstructure, electrical and magnetic properties of (Ga, Co)−ZnO films by radio frequency magnetron co-sputtering. Surf Coat Technol, 2016, 303: 203 [32] Coey J M D, Venkatesan M, Fitzgerald C B. Donor impurity band exchange in dilute ferromagnetic oxides. Nat Mater, 2005, 4: 173 [33] Dietl T, Ohno H, Matsukura F, et at. Zener model description of ferromagnetism in zinc-blende magnetic semiconductors. Science, 2000, 287(5455): 1019 [34] Griffin K A, Pakhomov A B, Wang C M, et al. Intrinsic ferromagnetism in insulating cobalt doped anatase TiO2 . Phys Rev Lett, 2005, 94(15): 157204 [35] Behan A J, Mokhtari A, Blythe H J, et al. Two magnetic regimes in doped ZnO corresponding to a dilute magnetic semiconductor and a dilute magnetic insulator. Phys Rev Lett, 2008, 100(4): 047206 [36] 刘 芬等: 射频磁控溅射制备 (In, Co) 共掺 ZnO 薄膜的电学和磁学性质 · 391 ·
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