HP/k +-0+ k;L H]T very large/ h Limits: Growth mass diffusion reaction limited by: transpo Reaction-rate limited Diffusion limited k i <h, Do2/x Do2/.<kh G G C HP DO C=HP CaC C≈0 C年 Oxide Silicon Gas Oxide Silicon Sept 19,2003 Slower process controls concentration of oxygen at interface which in turn controls growth rate† 2 Limits: Growth limited by: Ci = HPg /ki 1 h + xox DO2 + 1 ki mass transport diffusion reactionReaction-rate limited: Diffusion limited: ki < hg, DO2/xox hg h = very large HkT Ci = HPg DO2/xox < ki, hg, Ci = gDO2 kixox HP Sept. 19, 2003 Slower process controls concentration of oxygen at interface, which in turn controls growth rate…