第42卷第7 中国测试 Vol 42 No. 7 016年7月 CHINA MEASUREMENT tEst July, 2016 doi:10.11857/issn.l6745124.2016.07.001 MEMS壁面剪切应力传感器研究进展 雷强,高杨23,王雄4 (1.西南科技大学信息工程学院,四川绵阳621010;2.中国工程物理研究院电子工程研究所,四川绵阳621999 核探测与核电子学国家重点实验室(中国科学院高能物理硏究所),北京100049; 4.中国空气动力研究与发展中心,四川绵阳621000) 摘要:壁面剪切应力的时间特性是用于反映单个动量运输过程中非稳态结构的一个测量参数,也是湍流中相干位点 的一个表征方法,是一个重要的壁面湍流的物理量。目前,主要基于近壁或壁面处的平均速度梯度和换热率与壁面切 应力成正比的基础上对MEMS壁面剪切应力开展研究。因此,对MEMS璧面剪切应力传感器进行综述。根据不同的测 量方式,MEMS剪切应力传感器主要分为直接测量和间接测量两种类型。对每种测量方法的原理、研究现状、优点和限 制进行分析。MEMS技术使得剪切应力传感器取得显著的进步,提高空间和时间分辨率,以及测量结果的准确度。但 令Ns剪切应力传感器还需要进一步发展并且量化测量中的不确定度才能成为一种可靠的剪切应力测量技术。最 未来MEMS剪切应力传感器的发展方向进行总结 关键词 传感器;剪切应力;湍流测量 文献标志码:A 文章编号:1674-5124(2016)07-0001-08 The development progress of MEMs wall shear stress sensors LEI Qiang, GAO Yang., WANG Xiong. (1. School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010,China 2. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China 3. State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, CAS Beijing 100049, China; 4. China Aerodynamics Research and Development Center, Mianyang 621000, China) Abstract: Time characteristic of wall shear stress, not only a measurement parameter used to reflect unsteady structure during individual momentum transport in flow state, but also a characterization method of corresponding points in turbulence, is an important physical indicatorfor wall turbulence. At present, the research on MEMS wall shear stress is mainly based on the fact thatmean velocity gradient and heat transfer rate near the wall or on wall surface is proportional to the wall shear stress on wall surface. So this paper summarizes the MEMS wall shear stress sensor. MEMS shear stress sensors are divided into direct measurement and indirect measurement types according to the different ways of measurement. The principles, research status, advantages and limitations of each measurement method have also been analyzed. The wall shear stress temporal resolution. However, MEMS shear stress sensors need further development, and.d sensors have made a significant progress via MEMS technology, which improved the spatial an uncertainty should be quantified in order to become a reliable shear stress measurement technology. Finally, the future development directions of the MEMS shear stress sensors are Keywords: MEMS; sensors; shear stress; tubulence measurementMEMS 壁面剪切应力传感器研究进展 雷 强 1袁 高 杨 2袁3袁 王 雄 4 （1. 西南科技大学信息工程学院，四川 绵阳 621010；2. 中国工程物理研究院电子工程研究所，四川 绵阳 621999； 3. 核探测与核电子学国家重点实验室（中国科学院高能物理研究所），北京 100049； 4. 中国空气动力研究与发展中心，四川 绵阳 621000） 摘 要院壁面剪切应力的时间特性是用于反映单个动量运输过程中非稳态结构的一个测量参数袁也是湍流中相干位点 的一个表征方法袁是一个重要的壁面湍流的物理量遥 目前袁主要基于近壁或壁面处的平均速度梯度和换热率与壁面切 应力成正比的基础上对 MEMS 壁面剪切应力开展研究遥因此袁对 MEMS 壁面剪切应力传感器进行综述遥根据不同的测 量方式袁MEMS 剪切应力传感器主要分为直接测量和间接测量两种类型遥对每种测量方法的原理尧研究现状尧优点和限 制进行分析遥 MEMS 技术使得剪切应力传感器取得显著的进步袁提高空间和时间分辨率袁以及测量结果的准确度遥 但 MEMS 剪切应力传感器还需要进一步发展袁并且量化测量中的不确定度袁才能成为一种可靠的剪切应力测量技术遥 最 后袁对未来 MEMS 剪切应力传感器的发展方向进行总结遥 关键词院MEMS曰传感器曰剪切应力曰湍流测量 文献标志码院A 文章编号院1674-5124渊2016冤07-0001-08 The development progress of MEMS wall shear stress sensors LEI Qiang1，GAO Yang2，3，WANG Xiong4 （1. School of Information Engineering，Southwest University of Science and Technology，Mianyang 621010，China； 2. Institute of Electronic Engineering，China Academy of Engineering Physics，Mianyang 621999，China； 3. State Key Laboratory of Particle Detection and Electronics，Institute of High Energy Physics，CAS， Beijing 100049，China； 4. China Aerodynamics Research and Development Center，Mianyang 621000，China） Abstract: Time characteristic of wall shear stress， not only a measurement parameter used to reflect unsteady structure during individual momentum transport in flow state， but also a characterization method of corresponding points in turbulence，is an important physical indicatorfor wall turbulence. At present，the research on MEMS wall shear stress is mainly based on the fact thatmean velocity gradient and heat transfer rate near the wall or on wall surface is proportional to the wall shear stress on wall surface. So this paper summarizes the MEMS wall shear stress sensor. MEMS shear stress sensors are divided into direct measurement and indirect measurement types according to the different ways of measurement. The principles，research status，advantages and limitations of each measurement method have also been analyzed. The wall shear stress sensors have made a significant progress via MEMS technology，which improved the spatial and temporal resolution. However， MEMS shear stress sensors need further development， and it's uncertainty should be quantified in order to become a reliable shear stress measurement technology. Finally， the future development directions of the MEMS shear stress sensors are summarized. Keywords: MEMS；sensors；shear stress；tubulence measurement 中国测试 CHINA MEASUREMENT & TEST Vol.42 No.7 July，2016 第 42 卷第 7 期 2016 年 7 月 doi院10.11857/j.issn.1674-5124.2016.07.001