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What is common about these problems? Exterior Problems MEMS device fluid (air) creates drag ackage -EXterior fields create coupling Signal Line -EXterior fields Quantities of interest are on surface MEMS device Just want surface traction force Package -Just want coupling between conductors Signal Line- Just want surface charge Exterior problem is linear and space-invariant MEMS device- EXterior Stoke's flow equation (inear) Package -Maxwell's equations in free space(linear) Signal line -Laplace's equation in free spce(inear) But problems are geometrically very complex SMA+HPC⊙2003M Discretization of Boundary Integral Equations 8
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