Cs ion source Duoplasmatron ion source 23456789 Primary beam mass filter Cameca Sims Immersion lens Sample 1011-12 Dynamic emittance matching A Transfer lens system B Liquid metal source Entrance slit s 9 Ga 10. 900 electrostatic analyzer 8 11. Energy slit S 12. Intermediate lens 1 7 13. 900 magnetic sector 14. Exit slit S3 15. Projection lenses 16. Projection deflector 17. Channelplate Accelerating voltage 19 18. Fluorescence screen Secondary ions have low kinetic 18 19. Electron multiplier energies from zero to a few 20. Faraday cup hundred ev. 1, L2 and L3-electromagnetic lens vww. eaglabs com/mc/sims-instrumentation htmlCameca SIMS Accelerating voltage Secondary ions have low kinetic energies from zero to a few hundred eV. L1 , L2 and L3 - electromagnetic lens http://www.eaglabs.com/mc/sims-instrumentation.html