·816· 北京科技大学学报 第34卷 4.0 permalloy films deposited on a thin NiFeCr or NiCr underlayer.J 3.5 4 pl Phys,2000,87(9):6992 盖30 4]Fitzimmons M R,Silva T J,Crawford T M.Surface oxidation of permalloy thin films.Phys Rer B,2006,73 (1)article No. 014420 1.5 [5]Amos N,Fernandez R,Ikkawi R,et al.Magnetic force microsco- 1.0 py study of magnetic stripe domains in sputter deposited permalloy thin films.J Appl Phys,2008,103(7):article No.07E732 0.5 0 6]Ding L,Teng J,Zhan Q,et al.Enhancement of the magnetic 0 100200300400500 field sensitivity in Al2O,encapsulated NiFe films with anisotropic 温度℃ magnetoresistance.Appl Phys Lett,2009,94(16):article No. 图5退火温度对两种薄膜样品各向异性磁电阻值的影响.(a) 162506 Ta(5 nm)/NiFe(12 nm)/Ta(5 nm):(b)NiFeCr (4.5 nm)/NiFe Ding L,Teng J,Wang XC,et al.Designed synthesis of materials (12nm)/Ta(5 nm) for high-sensitivity geomagnetic sensors.Appl Phys Lett,2010,96 Fig.5 Dependence of the AMR values of two thin films on annealing (5):article No.052515 temperature:(a)Ta(5 nm)/NiFe(12nm)/Ta(5 nm):(b)NiFeCr [8]Volmera M,Neamtu J.Magnetic field sensors based on permalloy (4.5 nm)/NiFe(12 nm)/Ta(5 nm) multilayers and nanogranular films.J Magn Magn Mater,2007, 316(2):265 织构，NiFeCr缓冲层和NiFe层可以一致生长且具有 9]Wu P,Gao Y Q.Qiu H,et al.Magnetic properties and structure 良好的晶体结构. of Niso Feo/Nis Fe Crao bilayer films deposited on SiO/Si (3)以NiFeCr为缓冲层的薄膜具有更好的热 (100)by electron beam evaporation.Rare Met,2007,26 (2): 176 稳定性 [10]Lee W Y,Toney M F,Mauri D,et al.High magnetoresistance in sputtered permalloy thin films through growth on seed layers of 参考文献 (Nios Feo.)Cr,.IEEE Trans Magn,2000.36(1):381 [Lin T,Mauri D,York B,et al.Crystalline reconstruction in [11]Yu G H,Zhao H C,Li M H,et al.Interface reaction of Ta/Nis Ni-Cr-Fe/Ni-Fe films.Appl Phys Lett,2004,84(3):386 Fes or Nis Fes/Ta and its suppression.Appl Phys Lett,2002, 2]Warot B,Imrie J,Petford-ong A K,et al.Influence of seed 80(3):455 layers on the microstructure of NiFe layers.J MagnMagn Mater, [12]Rice D W,Suits J C,Lewis S J.Magnetic,corrosion,and 2004,272(Suppl1):1495 surface properties of Ni-Fe-Cr thin films.J Appl Phys,1976,47 B]Lee W Y,Toney M F,Tameerug P,et al.High magnetoresistance (3):1158北 京 科 技 大 学 学 报 第 34 卷 图 5 退火温度对两种薄膜样品各向异性磁电阻值的影响． ( a) Ta( 5 nm) /NiFe( 12 nm) /Ta( 5 nm) ; ( b) NiFeCr( 4. 5 nm) /NiFe ( 12 nm) /Ta( 5 nm) Fig． 5 Dependence of the AMR values of two thin films on annealing temperature: ( a) Ta( 5 nm) /NiFe( 12 nm) /Ta( 5 nm) ; ( b) NiFeCr ( 4. 5 nm) /NiFe( 12 nm) /Ta( 5 nm) 织构，NiFeCr 缓冲层和 NiFe 层可以一致生长且具有 良好的晶体结构． ( 3) 以 NiFeCr 为缓冲层的薄膜具有更好的热 稳定性． 参 考 文 献 ［1］ Lin T，Mauri D，York B，et al． Crystalline reconstruction in Ni-Cr-Fe /Ni-Fe films． Appl Phys Lett，2004，84( 3) : 386 ［2］ Warot B，Imrie J，Petford-Long A K，et al． Influence of seed layers on the microstructure of NiFe layers． J Magn Magn Mater， 2004，272( Suppl 1) : 1495 ［3］ Lee W Y，Toney M F，Tameerug P，et al． High magnetoresistance permalloy films deposited on a thin NiFeCr or NiCr underlayer． J Appl Phys，2000，87( 9) : 6992 ［4］ Fitzimmons M R，Silva T J，Crawford T M． Surface oxidation of permalloy thin films． Phys Rev B，2006，73 ( 1 ) : article No． 014420 ［5］ Amos N ，Fernandez R，Ikkawi R，et al． Magnetic force microsco￾py study of magnetic stripe domains in sputter deposited permalloy thin films． J Appl Phys，2008，103( 7) : article No． 07E732 ［6］ Ding L，Teng J，Zhan Q，et al． Enhancement of the magnetic field sensitivity in Al2O3 encapsulated NiFe films with anisotropic magnetoresistance． Appl Phys Lett，2009，94 ( 16 ) : article No． 162506 ［7］ Ding L，Teng J，Wang X C，et al． Designed synthesis of materials for high-sensitivity geomagnetic sensors． Appl Phys Lett，2010，96 ( 5) : article No． 052515 ［8］ Volmera M，Neamtu J． Magnetic field sensors based on permalloy multilayers and nanogranular films． J Magn Magn Mater，2007， 316( 2) : 265 ［9］ Wu P，Gao Y Q，Qiu H，et al． Magnetic properties and structure of Ni80 Fe20 /Ni48 Fe12 Cr40 bilayer films deposited on SiO2 /Si ( 100) by electron beam evaporation． Rare Met，2007，26 ( 2) : 176 ［10］ Lee W Y，Toney M F，Mauri D，et al． High magnetoresistance in sputtered permalloy thin films through growth on seed layers of ( Ni0. 81 Fe0. 19 ) 1 － xCrx ． IEEE Trans Magn，2000，36( 1) : 381 ［11］ Yu G H，Zhao H C，Li M H，et al． Interface reaction of Ta /Ni81 Fe19 or Ni81 Fe19 /Ta and its suppression． Appl Phys Lett，2002， 80( 3) : 455 ［12］ Rice D W，Suits J C，Lewis S J． Magnetic，corrosion，and surface properties of Ni-Fe-Cr thin films． J Appl Phys，1976，47 ( 3) : 1158 ·816·