Basic principles Electrons (SEM) BSE X-rays(EDS) Diffraction (elastic interaction) -X-rays -Electrons ·ED in TEM and EBSD in SEM Neutrons SE E=Eo E<Eo (EELS) The same basic theory for all waves. (TEM and ED) 2Basic principles 2 The same basic theory for all waves. • Diffraction (elastic interaction) – X-rays – Electrons • ED in TEM and EBSD in SEM – Neutrons