上泽通大学 新型扫描电镜的工作示意图 SHANGHAI JIAO TONG UNIVERSITY rW SEM column Aberration Corrector. Electric Fountain/Toroidal Objective lens spectrometer SE extractor BSE Flat lens Specimen SE Flat Detector Detector (a) High dielectric permittivity material Sector 1 Sector 4 Sector 2 口 0 V shielding Specimen plates Sector 3新型扫描电镜的工作示意图