Proximity Printing Limits Minimum resolvable feature =(g 1/2 Gap=20 um and Source =436 nm →3.0m Maximum allowable proximity gap for near and deep Uv sources as a function of the feature size normalized to the gap required for 2.5 um resolution with a deep UV source Maximum Gap for Maximum Gap for Feature Size(um) Near UV Source Deep UV Source 2.5 2.0 0.37 0.61 1.0 0.24 0.5 0.05 0.07 Fall 2003-MA Schmidt 315516.152]- Lecture10-Side11Proximity Printing Limits Minimum resolvable feature = ( Og)1/2 Gap = 20 Pm and Source = 436 nm 3.0 Pm Fall 2003 – M.A. Schmidt 3.155J/6.152J – Lecture 10 – Slide 11