Material characterization VE-AFM/DFM(Micro Viscoelasticity Meas.) Purpose】 Distribution of the viscoelasticity change in the polymer surface can be observed INPUT Vibration Principle Signal to PZT Detecting the amplitude and phase (1~10kHz) (Large) change of the cantilever distortion maID) OUTPUT when the cyclic force is applied v Deflection Signal of Advantage Canti lever Cant i lever Simultaneous imaging with opography Material difference or distribution OUTPUT can be detected even no change in Deflect ion topography Signal of Sample (SmaIl) (Large) Application] o Plastics, Rubber, Biological MaterialsOUTPUT Deflection Signal of Cantilever INPUT Vibration Signal to PZT (1～10kHz) OUTPUT Deflection Signal of Sample (Large) (Small) PZT Cantilever （Small） （Large） Material Characterization VE-AFM/DFM（Micro Viscoelasticity Meas.） 【Purpose】 ◆Distribution of the viscoelasticity change in the polymer surface can be observed. 【Principle】 ◆ Detecting the amplitude and phase change of the cantilever distortion when the cyclic force is applied. 【Advantage】 ◆Simultaneous imaging with topography ◆Material difference or distribution can be detected even no change in topography 【Application】 ◆ Plastics, Rubber, Biological Materials