工程科学学报，第41卷，第2期：261-268,2019年2月 Chinese Joural of Engineering,Vol.41,No.2:261-268,February 2019 DOI:10.13374/j.issn2095-9389.2019.02.014;http://journals.ustb.edu.cn 基于捷径重试规则晶圆带式搬运系统性能优化 周炳海⑧，陈立扬 同济大学机械与能源工程学院，上海201804 区通信作者，E-mail:bhzhou@tongji.cu.cm 摘要采用数学分析的方法构建了性能分析模型并提出了制定捷径决策的方法.在建模过程中，首先引入了重试运输规 则，并考虑重试率随捷径策略变动的情况下，引用相关重试排队模型，构建了系统期望在制品数量的数学表达式.同时根据每 条捷径的使用成本，构建了相应的捷径成本的数学表达式.从而获得以最小化捷径数量与在制品数量为目标函数的优化分析 模型.此外，引入了基于传送带长度的约束条件，使系统在每段传送带以及捷径上的在制品数量不会超过传送带的容量限制. 最后使用NSGA-Ⅱ算法对多目标优化问题进行分析计算.考察在不同物流负荷下的系统在制品数量和成本之间的关系变化 规律，并分别绘制帕累托前沿图形进行比较分析，研究了目标函数中的系数设定对系统的影响，并结合聚类分析的算法对所 得的解集进行分类.综合以上分析结果总结出系统捷径的最佳使用策略，并通过与现有系统和搬运策略进行比较，证实了该 策略在降低成本和在制品方面的有效性。 关键词晶圆制造；捷径优化；自动物料搬运系统；重试排队模型；interbay系统 分类号TP29 Performance optimization of the wafer conveyor handling system using the crossover retrial rule ZHOU Bing-hai,CHEN Li-yang School of Mechanical Engineering,Tongji University,Shanghai 201804,China Corresponding author,E-mail:bhzhou@tongji.edu.cn ABSTRACT The semiconductor wafer fabrication system is one of the most complex discrete manufacturing systems owing to its great number of production steps,heavy re-entry production flow,various kinds of products,etc.The automatic material handling system plays a key role in improving the production efficiency.reducing the work in process (WIP),and shortening the production cycle time of the semiconductor factory.To rapidly and effectively evaluate the impact of crossover systems on the overall performance of transport systems in wafer production,a performance analysis model was built by mathematical analysis and a decision-making method of cross- overs was established.In the modeling procedure,the retrial transportation rule was first introduced.Then,considering the change in retrial rate affected by the crossovers strategy and referencing the related retrial queuing model,the mathematical expression of the ex- pected WIP was constructed.Simultaneously,according to the cost of each crossover,the mathematical expression of the cost of cross- overs was built.The optimization analysis model was obtained with the objective of minimizing the number of crossovers and WIP.Fur- thermore,the constraint conditions based on the length of the conveyor belt were introduced,so that the number of WIP products on each conveyor belt and crossover would not exceed the capacity limit of the conveyor belt.Finally,the NSGA-II algorithm was used to solve the multi-objective optimization problem.The relation between the number of WIP and cost of crossovers under different logistics loads was investigated,and Pareto frontier charts were drawn up for comparative analysis.The influence of parameter settings on the objective function of the system was studied,and the solution set was classified by clustering the analysis algorithm.Based on the above 收稿日期：2017-12-30 基金项目：国家自然科学基金资助项目(71471135)工程科学学报,第 41 卷,第 2 期:261鄄鄄268,2019 年 2 月 Chinese Journal of Engineering, Vol. 41, No. 2: 261鄄鄄268, February 2019 DOI: 10. 13374 / j. issn2095鄄鄄9389. 2019. 02. 014; http: / / journals. ustb. edu. cn 基于捷径重试规则晶圆带式搬运系统性能优化 周炳海苣 , 陈立扬 同济大学机械与能源工程学院, 上海 201804 苣通信作者, E鄄mail: bhzhou@ tongji. edu. cn 摘 要 采用数学分析的方法构建了性能分析模型并提出了制定捷径决策的方法. 在建模过程中,首先引入了重试运输规 则,并考虑重试率随捷径策略变动的情况下,引用相关重试排队模型,构建了系统期望在制品数量的数学表达式. 同时根据每 条捷径的使用成本,构建了相应的捷径成本的数学表达式. 从而获得以最小化捷径数量与在制品数量为目标函数的优化分析 模型. 此外,引入了基于传送带长度的约束条件,使系统在每段传送带以及捷径上的在制品数量不会超过传送带的容量限制. 最后使用 NSGA鄄鄄II 算法对多目标优化问题进行分析计算. 考察在不同物流负荷下的系统在制品数量和成本之间的关系变化 规律,并分别绘制帕累托前沿图形进行比较分析,研究了目标函数中的系数设定对系统的影响,并结合聚类分析的算法对所 得的解集进行分类. 综合以上分析结果总结出系统捷径的最佳使用策略,并通过与现有系统和搬运策略进行比较,证实了该 策略在降低成本和在制品方面的有效性. 关键词 晶圆制造; 捷径优化; 自动物料搬运系统; 重试排队模型; interbay 系统 分类号 TP29 收稿日期: 2017鄄鄄12鄄鄄30 基金项目: 国家自然科学基金资助项目(71471135) Performance optimization of the wafer conveyor handling system using the crossover retrial rule ZHOU Bing鄄hai 苣 , CHEN Li鄄yang School of Mechanical Engineering, Tongji University, Shanghai 201804, China 苣Corresponding author, E鄄mail: bhzhou@ tongji. edu. cn ABSTRACT The semiconductor wafer fabrication system is one of the most complex discrete manufacturing systems owing to its great number of production steps, heavy re鄄entry production flow, various kinds of products, etc. The automatic material handling system plays a key role in improving the production efficiency, reducing the work in process (WIP), and shortening the production cycle time of the semiconductor factory. To rapidly and effectively evaluate the impact of crossover systems on the overall performance of transport systems in wafer production, a performance analysis model was built by mathematical analysis and a decision鄄making method of cross鄄 overs was established. In the modeling procedure, the retrial transportation rule was first introduced. Then, considering the change in retrial rate affected by the crossovers strategy and referencing the related retrial queuing model, the mathematical expression of the ex鄄 pected WIP was constructed. Simultaneously, according to the cost of each crossover, the mathematical expression of the cost of cross鄄 overs was built. The optimization analysis model was obtained with the objective of minimizing the number of crossovers and WIP. Fur鄄 thermore, the constraint conditions based on the length of the conveyor belt were introduced, so that the number of WIP products on each conveyor belt and crossover would not exceed the capacity limit of the conveyor belt. Finally, the NSGA鄄鄄II algorithm was used to solve the multi鄄objective optimization problem. The relation between the number of WIP and cost of crossovers under different logistics loads was investigated, and Pareto frontier charts were drawn up for comparative analysis. The influence of parameter settings on the objective function of the system was studied, and the solution set was classified by clustering the analysis algorithm. Based on the above