Deposition Techniques: Initial letter of the deposition material A BC D E G H I K LM N O E R S I L Y Y Z Key of Symbols *Cr-plated mod o Temn.(C for Vap.Press (forr) E-Bear Coil Basket Crucible e60 678211010 nBz.w RE.DC Alloys and wets Stranded Wis best 08 43 RE 3.7 ·300 RF 7 2.64 .、0 ninum Carbide 小1400 b2.36· -800F RE 0=27 m.2%Copp A12%Cu 640 2.82 RF,DC um Fluoride 1291 82.88410490700P Mo.W.Ta AIN >2200 s 326 卜1750F RF.RF-R um Oxide 3.97 ·150e RF-R mohom 2000 22 um.2%Silicon 640 260 1010 TIB-BN RF,DC 630 s6.68279345425p Mo."Ta Mo,Ta Mo.Ta BN.C.Al,O RF,DC 66 ·3006 Pt BN.AlO RF-R Toxk.Decomposes on W.n.09.Material Symbol MP (°C) S/D g/cm3 Temp.(°C) for Given Vap. Press. (Torr) Evaporation Techniques Sputter Comments 10-8 10-6 10-4 E-Beam Thermal Sources Boat Coil Basket Crucible Aluminum Al 660 2.70 677 821 1010 Ex TiB2 ,W W W TiB2 -BN, ZrB2 , BN RF, DC Alloys and wets. Stranded W is best. Aluminum Antimonide AlSb 1080 4.3 - - - - - - - - RF - Aluminum Arsenide AlAs 1600 3.7 - - ~ 1300 - - - - - RF - Aluminum Bromide AlBr3 97 2.64 - - ~ 50 - Mo - - Gr RF - Aluminum Carbide Al4C3 ~1400 D 2.36 - - ~ 800 F - - - - RF n = 2.7 Aluminum, 2% Copper Al2%Cu 640 2.82 - - - - - - - - RF, DC Wire feed and flash. Difficult from dual sources. Aluminum Fluoride AlF3 1291 S 2.88 410 490 700 P Mo, W, Ta - - Gr RF - Aluminum Nitride AlN >2200 S 3.26 - - ~1750 F - - - - RF, RF-R Decomposes. Reactive evap in 10-3 T N2 with glow discharge. Aluminum Oxide Al2O3 2072 3.97 - - 1550 Ex W - W - RF-R Sapphire excellent in E-beam; forms smooth, hard films. n = 1.66 Aluminum Phosphide AlP 2000 2.42 - - - - - - - - RF - Aluminum, 2% Silicon Al2%Si 640 2.69 - - 1010 - - - - TiB2 -BN RF, DC Wire feed and flash. Difficult from dual sources. Antimony Sb 630 S 6.68 279 345 425 P Mo,*** Ta*** Mo, Ta Mo, Ta BN, C, Al2O3 RF, DC Toxic. Evaporates well. Antimony Oxide Sb2O3 656 S 5.2 - - ~300 G Pt - Pt BN, Al2O3 RF-R Toxic. Decomposes on W. n = 2.09, Deposition Techniques: Initial letter of the deposition material A B C D E G H I K L M N O P R S T U V Y Z Key of Symbols * influenced by composition ** Cr-plated rod or strip ***All metals alumina coated C = carbon Gr = graphite Q = quartz Incl = Inconel VC = vitreous carbon SS = stainless steel Ex = excellent G = good F = fair P = poor S = sublimes D = decomposes RF = RF sputtering is effective RF-R = reactive RF sputter is effective DC = DC sputtering is effective DC-R = reactive DC sputtering is effective