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Typical SEM EBSD set-up incident electron beam: 8-40kV,0.01-50nA EBSD detector-position emitted usually constrained by electrons Specimen: chamber geometry Surface normal typically EBSD detector inclined60°-80° to beam Pattern Camera processing EBSD detector distance set to give ~90 low-light sensitive (now angular range in EBSP digital;originally analogue) (Courtesy of Dr Ke Chen) 11incident electron beam: 8-40kV, 0.01-50nA Specimen: Surface normal typically inclined 60°-80° to beam EBSD detector - position usually constrained by chamber geometry EBSD detector distance set to give ~90 ° angular range in EBSP emitted electrons low-light sensitive (now digital; originally analogue) Typical SEM EBSD set-up (Courtesy of Dr Ke Chen) 11
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