Spatial resolution and detection limit 100% 10% TEM AES SEM Raman XPS XRD 1% FTIR 0.1% nano- SIMS WDS U-PIXE U-XRF XRF 100 ppm 10 ppm TOF-SIMS 1 ppm ICP-MS/ 100 ppb INAA SIMS LA-ICP-MS 10ppb APT Tppb 100 ppt Nano Micro Bulk 10 ppt Atom probe 0.1nm 1 nm 10 nm 100nm 1μm 10 um 100μm 1mm 1 cm tomography is superior in Elemental composition sensitivity and EDS EELS EBSD CL Structural information spatial resolution. Surface and thin film analysis ED EDS SEM and TEM host multiple techniques 3 http://www.ammrf.org.au/myscope/analysis/introduction/ TEM SEMSpatial resolution and detection limit 3 http://www.ammrf.org.au/myscope/analysis/introduction/ Atom probe tomography is superior in sensitivity and spatial resolution