Field lon Microscope Invented by Erwin W.Muller in 1951 at F>10 V/nm. the Pennsylvania State University eFx Poralized gas atom Microchannel plate Phosphor screen Distance,x Gas ion E、w FIMbp cooled to 20-100K Tunnelng xe:-0.45 nm 88 Electron 4◆0--声 Gas atom etallic cathode https://www.nims.go.jp/mmu/tutorials/fim.htmlField Ion Microscope F > 10 V/nm. https://www.nims.go.jp/mmu/tutorials/fim.html Invented by Erwin W. Müller in 1951 at the Pennsylvania State University 4