Material Characterization using SPM SII O eiko Instruments Inc Visco-elasticity VE-AFMDFM Phase Friction force Polymer characterization in PM nano scale level (FFM/LM-FEM Hardness Adhesive Force adhesio Glass transVisco-elasticity Friction Force Adhesive Force Glass trans. Phase Hardness Polymer characterization in nano scale level VE-AFM/DFM PM FFM/LM-FFM Adhesion Material Characterization using SPM