Material Characterization DFM/PM (Phase mode) measurement SII C Seiko Instruments Inc 【 Purpose Distribution of the characteristics change in the polymer surface can e observed ( Principle Detecting the phase change in DFM measurement 【 Advantage Simultaneous imaging with DFM 2 Same advantage as DFM for the soft or charged surface (which is difficult to apply lM-FFM or VE-AFM) Topography(7um) resin Observed image of the heat shrinkage rubber silicon (resin/silicon rubber) rubber【Purpose】 ◆ Distribution of the characteristics change in the polymer surface can be observed. 【Principle】 ◆Detecting the phase change in DFM measurement 【Advantage】 ◆Simultaneous imaging with DFM ◆Same advantage as DFM for the soft or charged surface. (which is difficult to apply LM-FFM or VE-AFM) resin silicon rubber Topography（７μｍ） PM image（７μｍ） Material Characterization DFM／PM （Phase mode）measurement Observed image of the heat shrinkage rubber （resin/silicon rubber） →