Mass commercial application: Acceleration Sensors Elastic hinge Proof mass Analog Devices' ADXL50 accelerometer Surface micromachining capacitive sensor Spacer 2.5x25 mm die incl. electronic controls Force Silicon substrate Cost: $30 vS -$300 bulk sensor( 93) Cut to $5/axis by 1998 Replaced by 3-axis ADXL 150 Capacitive Accelerometer 4mm CMOS Device area Micromechanical Device Area Mochanical circuit X-Axis Z-AxIs Ref. Circuit n-bpe silicon suberate Every new car sold has micromachined sensors on-board. They Y-Axi ange from MAP( Manifold Absolute Pressure)engine sensor accelerometers for active suspension systems, automatic door locks and antilock braking and airbag systems. The field is also widening considerably in other markets. Micromachined accelerometer sensors are now being used in seismic recording, machine monitoring, and circuitr Master: Clock diagnostic systems-or basically any application where gravity, shock, and vibration are http://w.analog.com/library/techarticles/mems/xlbckgdr4.htmlMass commercial application: Acceleration Sensors http://www.analog.com/library/techArticles/mems/xlbckgdr4.html Analog Devices' ADXL50 accelerometer Surface micromachining capacitive sensor 2.5 x 2.5 mm die incl. electronic controls Cost: $30 vs ~$300 bulk sensor (‘93) Cut to $5/axis by 1998 Replaced by 3-axis ADXL150 “Every new car sold has micromachined sensors on-board. They range from MAP (Manifold Absolute Pressure) engine sensors, accelerometers for active suspension systems, automatic door locks, and antilock braking and airbag systems. The field is also widening considerably in other markets. Micromachined accelerometer sensors are now being used in seismic recording, machine monitoring, and diagnostic systems - or basically any application where gravity, shock, and vibration are factors.” Capacitive Accelerometer Silicon substrate Elastic hinge Proof Mass Spacer Force