What are MEMS? Micro-Electro-Mechanical Systems manufactured using technology created for VLSI electronics to build micron-scale devices released by selective etching Surface Micromachining ·LGA( electroforming) Deep Reactive lon Etching electrically controlled by Electrostatic attraction Electromagnetic force Photos courtesy Electrostriction Sandia National Labs Resistive heating Note:MEMS”≠ passive silicon v- groovesWhat are MEMS? Micro-Electro-Mechanical Systems • Surface Micromachining • LIGA (electroforming) • Deep Reactive Ion Etching • Electrostatic attraction • Electromagnetic force • Electrostriction • Resistive heating Photos courtesy Sandia National Labs … manufactured using technology created for VLSI electronics to build micron-scale devices “released” by selective etching …& electrically controlled by Note: “MEMS” = passive silicon V-grooves