郭建超等：氩氢摩尔比对直流电弧等离子体喷射法等离子体放电特征影响的计算 *1635· [15]Kramida A,Ralchenko Y,Reader J,et al.NIST Atomic Spectra 26]Adibzadeh M,Theodosiou C E.Elastic electron scattering from Database (ver.5.3)[DB/OL].National Institute of Standards inert-gas atoms.At Data Nucl Data Tables,2005,91(1):8 and Technology (2015-001)[2016-01-01].http://www. 27]Bruno D,Catalfamo C,Capitelli M,et al.Transport properties physics.nist.gov/PhysRefData/ASD/Html/verhist.shtml of high-emperature Jupiter atmosphere components.Phys [16]Wang WZ,Rong MZ,Murphy A B,et al.Calculation analysis Plasmas,2010,17(11):112315 on statistic thermodynamic properties of thermal arc plasmas.J 128]Mason E A,Munn R J,Smith F J.Transport coefficients of ion- Xi an Jiaotong Univ,2011,45(4):86 ized gases.Phys Fluids,1967,10(8):1827 (王伟宗，荣命哲，Murphy A B,等.平衡态电弧等离子体统 229]Devoto R S.Simplified expressions for the transport properties of 计热力学属性的计算.西安交通大学学报，2011,45(4)： ionized monatomic gases.Phys Fluids,1967,10(10):2105 86) B0]Guo J C,Liu J L,Yan X B,et al.Numerical simulation of plas- [17]Devoto R S.Transport coefficients of partially ionized hydrogen. ma discharge properties in DC arc plasma jet.Vac Sci Technol, J Plasma Phys,1968,2(4):617 2016,36(3):312 [18]Stallcop J R,Levin E,Partridge H.Transport properties of hy- (郭建超，刘金龙，闫雄伯，等.基于FLUENT软件直流电弧 drogen.J Thermophys Heat Transfer,1998,12 (4):514 等离子体喷射法等离子体放电特征二维数值模拟.真空科 [19]Stallcop J R,Partridge H,Levin E.H-H,collision integrals and 学与技术学报，2016,36(3)：312) transport coefficients.Chem Phys Lett,1996,254(1):25 1]Murphy A B.Demixing in freeurning ares.Phys Rer E,1997, D0]Aziz R A,Slaman M J.The repulsive wall of the Ar-Ar inter- 55(6):7473 atomic potential reexamined.J Chem Phys,1990,92 (2):1030 B2]Zhang H,Li SS,Su T C,et al.Effect of temperature on the 1]Aubreton J,Fauchais P.Influence des potentiels dinteraction (100)surface features of type Ib and type lla large single crystal sur les proprietes de transport des plasmas thermiques:exemple diamonds.Acta Phys Sin,2015,64(19):0198103 d'application le plasma argon hydrogene a la pression (张贺，李尚升，宿太超，等.温度对凸型和型金刚石大 atmospherique.Rer Phys Appl,1983,18(1)51 单品(100)表面特征的影响.物理学报，2015,64(19)： 2]Dunker A M,Gordon RG.Bound atom-iatomic molecule com- 0198103) plexes.Anisotropic intermolecular potentials for the hydrogen- B3]Liu C,Wang J H,Weng J.Preparation of the high-quality high- rare gas systems.J Chem Phys,1978,68(2):700 ly (100)oriented diamond films with controllable growth.Acta 3]Murphy A B.Transport coefficients of helium and argon-helium Phys Sin,2015,64(2）:028101 plasmas.IEEE Trans Plasma Sci,1997,25 (5)809 (刘聪，汪建华，翁俊.高质量高取向(100)面金刚石膜的可 24]Murphy A B.Transport coefficients of hydrogen and argon-hy- 控性生长.物理学报，2015,64(2)：028101) drogen plasmas.Plasma Chem Plasma Process,2000,20(3): B4]Mccauley T G,Gruen D M,Krauss A R.Temperature depend- 279 ence of the growth rate for nanocrystalline diamond films deposi- 25]Devoto R S.Transport coefficients of partially ionized argon. ted from an Ar/CH,microwave plasma.Appl Phys Lett,1998, Phys Fluids,1967,10(2):354 73(12):1646郭建超等: 氩氢摩尔比对直流电弧等离子体喷射法等离子体放电特征影响的计算 ［15］ Kramida A，Ｒalchenko Y，Ｒeader J，et al． NIST Atomic Spectra Database ( ver． 5． 3) ［DB /OL］． National Institute of Standards and Technology ( 2015-10-01) ［2016-01-01］． http: / /www． physics． nist． gov /PhysＲefData /ASD/Html /verhist． shtml ［16］ Wang W Z，Ｒong M Z，Murphy A B，et al． Calculation analysis on statistic thermodynamic properties of thermal arc plasmas． J Xi'an Jiaotong Univ，2011，45( 4) : 86 ( 王伟宗，荣命哲，Murphy A B，等． 平衡态电弧等离子体统 计热力学属性的计算． 西安交通大学学报，2011，45 ( 4) : 86) ［17］ Devoto Ｒ S． Transport coefficients of partially ionized hydrogen． J Plasma Phys，1968，2( 4) : 617 ［18］ Stallcop J Ｒ，Levin E，Partridge H． Transport properties of hy￾drogen． J Thermophys Heat Transfer，1998，12( 4) : 514 ［19］ Stallcop J Ｒ，Partridge H，Levin E． H--H2 collision integrals and transport coefficients． Chem Phys Lett，1996，254( 1) : 25 ［20］ Aziz Ｒ A，Slaman M J． The repulsive wall of the Ar--Ar inter￾atomic potential reexamined． J Chem Phys，1990，92( 2) : 1030 ［21］ Aubreton J，Fauchais P． Influence des potentiels d'intéraction sur les propriétés de transport des plasmas thermiques: exemple d'application le plasma argon hydrogène à la pression atmosphérique． Ｒev Phys Appl，1983，18( 1) : 51 ［22］ Dunker A M，Gordon Ｒ G． Bound atom--diatomic molecule com￾plexes． Anisotropic intermolecular potentials for the hydrogen-- rare gas systems． J Chem Phys，1978，68( 2) : 700 ［23］ Murphy A B． Transport coefficients of helium and argon--helium plasmas． IEEE Trans Plasma Sci，1997，25( 5) : 809 ［24］ Murphy A B． Transport coefficients of hydrogen and argon--hy￾drogen plasmas． Plasma Chem Plasma Process，2000，20 ( 3) : 279 ［25］ Devoto Ｒ S． Transport coefficients of partially ionized argon． Phys Fluids，1967，10( 2) : 354 ［26］ Adibzadeh M，Theodosiou C E． Elastic electron scattering from inert-gas atoms． At Data Nucl Data Tables，2005，91( 1) : 8 ［27］ Bruno D，Catalfamo C，Capitelli M，et al． Transport properties of high-temperature Jupiter atmosphere components． Phys Plasmas，2010，17( 11) : 112315 ［28］ Mason E A，Munn Ｒ J，Smith F J． Transport coefficients of ion￾ized gases． Phys Fluids，1967，10( 8) : 1827 ［29］ Devoto Ｒ S． Simplified expressions for the transport properties of ionized monatomic gases． Phys Fluids，1967，10( 10) : 2105 ［30］ Guo J C，Liu J L，Yan X B，et al． Numerical simulation of plas￾ma discharge properties in DC arc plasma jet． Vac Sci Technol， 2016，36( 3) : 312 ( 郭建超，刘金龙，闫雄伯，等． 基于 FLUENT 软件直流电弧 等离子体喷射法等离子体放电特征二维数值模拟． 真空科 学与技术学报，2016，36( 3) : 312) ［31］ Murphy A B． Demixing in free-burning arcs． Phys Ｒev E，1997， 55( 6) : 7473 ［32］ Zhang H，Li S S，Su T C，et al． Effect of temperature on the ( 100) surface features of type Ib and type IIa large single crystal diamonds． Acta Phys Sin，2015，64( 19) : 0198103 ( 张贺，李尚升，宿太超，等． 温度对 Ib 型和 IIa 型金刚石大 单晶 ( 100) 表面特征的影响． 物理学报，2015，64 ( 19) : 0198103) ［33］ Liu C，Wang J H，Weng J． Preparation of the high-quality high￾ly ( 100) oriented diamond films with controllable growth． Acta Phys Sin，2015，64( 2) : 028101 ( 刘聪，汪建华，翁俊． 高质量高取向( 100) 面金刚石膜的可 控性生长． 物理学报，2015，64( 2) : 028101) ［34］ Mccauley T G，Gruen D M，Krauss A Ｒ． Temperature depend￾ence of the growth rate for nanocrystalline diamond films deposi￾ted from an Ar/CH4 microwave plasma． Appl Phys Lett，1998， 73( 12) : 1646 ·1635·