Several processes In serles SImplify cvD to 2 steps: △C B J,=kc 2 Reaction rate constant, ks Stlcking coeficient yr as in oxidation but no 0≤%AB≤ sold-state diffusion here reaction occurs at surface AB bounces Good off surface ad heston Let's analyze, solve for J2 Mon.. Sept. 15. 2003Several processes in series Simplify CVD to 2 steps: Boundary AB layer Dg J1 = d DC J2 B A J2 = k Cs s Reaction rate constant, k Sticking coefficient gAB, s …as in oxidation, but no 0 ≤ gAB ≤ 1 sold-state diffusion here, reaction occurs at surface. AB bounces Good off surface adhesion Let’s analyze, solve for J2… Mon., Sept. 15, 2003 7