Two man CVD layer =2△C1=bC8=C B =kC In steady state: J-J2n C, J,=kC h,(Co-C)=kcs tk h tk ectrical analog小=h R-R++R2 G=1/RG2G1+2) Two processes In serles; slowest one Imts film growth Mon.. Sept. 15. 2003J1 = J2, hg ( Cg - Cs ksCs J2 = ksCs = hgks hg + ks Cs = Cg hg hg + ks Cg , Boundary layer J2 = ksCs B A AB J2 J1 = hg( ) Cg - Cs process: J1 = Dg d DC In steady state: ) = Two main CVD J1 = J2, 1+R2 1G2 /(G1+G2) Electrical analogy: R = R G = 1/R= G Two processes in series; slowest one limits film growth Mon., Sept. 15, 2003 8