Two men cVD Boundary A: layer J1=△CJ=1(C2-C) 6 A J2=kc hk 2 h tk hk cc FIm growth rat≡y=J # h +k N h k Slower process controls growth Mon.. Sept. 15. 2003Boundary layer J2 = ksCs B A AB J2 J1 = hg( ) Cg - Cs Two main CVD process: J1 = Dg d DC J2 = ksCs = hgks hg + ks Cg ≡ v = J # area - t Ê ËÁ ˆ¯˜ 1 N # vol Ê ËÁ ˆ¯˜, v = hg ks hg + ks Cg Nf = Cg Nf 1 hg + 1 ks Film growth rate Slower process controls growth Mon., Sept. 15, 2003 9