Two men cVD pIocesS: AB leyer J ,=h c-C, A kC ExamIne these 2 mlts of growth, k, h, or k Transport LImited growth Reactlon lImlted growth, h《k k《h kC c AG C 3DO 3万5CJRe √Re KT 2LN 4LN ease of gas flow Mon.. Sept. 15. 2003Bou nd a ry laye r J 2 = k s C s B A AB J2 J1 = h g( ) Cg - C s Two m ain CVD p rocess: Exa mine these 2 limits of g rowth, hg or ks limited … Tra nspo rt limited g rowth, Reactio n limited g rowth, k < < h : v = Cg N f 1 h g + 1 ks s g h < < k : g s h C 3DC g kT g xg 3 lv C Re v = k s Cg = C k 0 e - D G v = g g Æ Re = N f 2LN f 4LN f N f N f ease of gas flow Mon., Sept. 15, 2003 10